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Rene Theodorus Petrus COMPEN
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Valkenswaard, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,269,949
Issue date
Sep 18, 2012
ASML Netherlands B.V.
Marcus Martinus Petrus Adrianus Vermeulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of placing a substrate, method of transferring a substrate,...
Patent number
8,154,709
Issue date
Apr 10, 2012
ASML Netherlands B.V.
Jozef Augustinus Maria Alberti
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of placing a substrate, method of transferring a substrate,...
Patent number
8,149,387
Issue date
Apr 3, 2012
ASML Netherlands B.V.
Jozef Augustinus Maria Alberti
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of transferring a substrate, transfer system and lithographi...
Patent number
8,086,348
Issue date
Dec 27, 2011
ASML Netherlands B.V.
Jozef Augustinus Maria Alberti
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of transferring a substrate, transfer system and lithographi...
Patent number
8,064,045
Issue date
Nov 22, 2011
ASML Netherlands B.V.
Jozef Augustinus Maria Alberti
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,978,308
Issue date
Jul 12, 2011
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, substrate table, and method for enhancing s...
Patent number
7,791,708
Issue date
Sep 7, 2010
ASML Netherlands B.V.
Michiel Puyt
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus
Patent number
7,639,345
Issue date
Dec 29, 2009
ASML Netherlands B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, cleaning system and cleaning method for in...
Patent number
7,385,670
Issue date
Jun 10, 2008
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of adjusting a height of protrusions on a support surface of...
Patent number
7,050,147
Issue date
May 23, 2006
ASML Netherlands B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110222045
Publication date
Sep 15, 2011
ASML NETHERLANDS B.V.
Rene Theodorus Petrus COMPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITION CALIBRATION OF ALIGNMENT HEADS IN A MULTI-HEAD ALIGNMENT S...
Publication number
20110013165
Publication date
Jan 20, 2011
ASML NETHERLANDS B.V.
Takeshi KANEKO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus, Substrate Table, and Method for Enhancing S...
Publication number
20100296073
Publication date
Nov 25, 2010
ASML NETHERLANDS B.V.
Michiel PUYT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Placing a Substrate, Method of Transferring a Substrate,...
Publication number
20100265488
Publication date
Oct 21, 2010
ASML NETHERLANDS B.V.
Jozef Augustinus Maria Alberti
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, A METHOD FOR REMOVING MATERIAL OF ONE OR MO...
Publication number
20100214549
Publication date
Aug 26, 2010
ASML NETHERLANDS B.V.
Theodorus Petrus Maria Cadee
B24 - GRINDING POLISHING
Information
Patent Application
CALIBRATION METHOD AND LITHOGRAPHIC APPARATUS FOR CALIBRATING AN OP...
Publication number
20100110408
Publication date
May 6, 2010
ASML NETHERLANDS B.V.
Rene Theodorus Petrus COMPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100085551
Publication date
Apr 8, 2010
ASML NETHERLANDS B.V.
Marcus Martinus Petrus Adrianus VERMEULEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Transferring a Substrate, Transfer System and Lithographi...
Publication number
20090153816
Publication date
Jun 18, 2009
ASML NETHERLANDS B.V.
Jozef Augustinus Maria ALBERTI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Transferring a Substrate, Transfer System and Lithographi...
Publication number
20090155026
Publication date
Jun 18, 2009
ASML NETHERLANDS B.V.
Jozef Augustinus Maria ALBERTI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20090086187
Publication date
Apr 2, 2009
ASML Netherlands
Rene Theodorus Petrus COMPEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080316461
Publication date
Dec 25, 2008
ASML NETHERLANDS B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, cleaning system and cleaning method for in...
Publication number
20080218712
Publication date
Sep 11, 2008
ASML NETHERLANDS B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, substrate table, and method for enhancing s...
Publication number
20080158538
Publication date
Jul 3, 2008
ASML NETHERLANDS B.V.
Michiel Puyt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus
Publication number
20070085987
Publication date
Apr 19, 2007
ASML NETHERLANDS B.V.
Joost Jeroen Ottens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, cleaning system and cleaning method for in...
Publication number
20060072085
Publication date
Apr 6, 2006
ASML NETHERLANDS B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of adjusting a height of protrusions on a support surface of...
Publication number
20060006340
Publication date
Jan 12, 2006
ASML NETHERLANDS B.V.
Rene Theodorus Petrus Compen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY