Rennie G. Barber

Person

Gresham, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for detecting backside contamination during fa...
- Patent number 6,943,055
- Issue date Sep 13, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for optimizing the electrostatic removal of a wor...
- Patent number 6,898,064
- Issue date May 24, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to use a laser to perform the edge clean operation on a semi...
- Patent number 6,874,510
- Issue date Apr 5, 2005
- LSI Logic Corporation
- Steven Reder
- B08 - CLEANING
Information Patent Grant
Laminate low K film
- Patent number 6,869,893
- Issue date Mar 22, 2005
- LSI Logic Corporation
- Steven Reder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for using film deposition techniques to provide a...
- Patent number 6,849,936
- Issue date Feb 1, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for cleaning deposited films from the edge of...
- Patent number 6,837,967
- Issue date Jan 4, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for detecting backside contamination during fa...
- Patent number 6,627,466
- Issue date Sep 30, 2003
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling element for a semiconductor fabrication chamber
- Patent number 5,942,038
- Issue date Aug 24, 1999
- LSI Logic Corporation
- Mark Mayeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cooling element for a semiconductor fabrication chamber
- Patent number 5,497,727
- Issue date Mar 12, 1996
- LSI Logic Corporation
- Mark Mayeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method to use a laser to perform the edge clean operation on a semi...
- Publication number 20050109369
- Publication date May 26, 2005
- LSI Logic Corporation
- Steven Reder
- B08 - CLEANING
Information Patent Application
System and method for using film deposition techniques to provide a...
- Publication number 20050093111
- Publication date May 5, 2005
- LSI Logic Corporation
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer cooling chuck with direct coupled peltier unit
- Publication number 20040248430
- Publication date Dec 9, 2004
- Rennie Barber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to use a laser to perform the edge clean operation on a semi...
- Publication number 20040154638
- Publication date Aug 12, 2004
- Steven Reder
- B08 - CLEANING
Information Patent Application
Laminate low K film
- Publication number 20040077179
- Publication date Apr 22, 2004
- Steven Reder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for detecting backside contamination during fa...
- Publication number 20040069407
- Publication date Apr 15, 2004
- Michael J. Berman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dynamic dechucking
- Publication number 20030210510
- Publication date Nov 13, 2003
- Thomas C. Hann
- H01 - BASIC ELECTRIC ELEMENTS

Rennie G. Barber

Person

Patents Grantslast 30 patents

Method and apparatus for detecting backside contamination during fa...

System and method for optimizing the electrostatic removal of a wor...

Method to use a laser to perform the edge clean operation on a semi...

Laminate low K film

System and method for using film deposition techniques to provide a...

Method and apparatus for cleaning deposited films from the edge of...

Method and apparatus for detecting backside contamination during fa...

Cooling element for a semiconductor fabrication chamber

Cooling element for a semiconductor fabrication chamber

Patents Applicationslast 30 patents

Method to use a laser to perform the edge clean operation on a semi...

System and method for using film deposition techniques to provide a...

Wafer cooling chuck with direct coupled peltier unit

Method to use a laser to perform the edge clean operation on a semi...

Laminate low K film

Method and apparatus for detecting backside contamination during fa...

Dynamic dechucking