Rens Henricus VERHEES

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Eindhoven, NL

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Patents Applicationslast 30 patents

Information Patent Application
RADIATION SOURCE MODULE AND LITHOGRAPHIC APPARATUS
- Publication number 20230367224
- Publication date Nov 16, 2023
- ASML NETHERLANDS B.V.
- Hrishikesh PATEL
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radiation Source Module and Lithographic Apparatus
- Publication number 20200124976
- Publication date Apr 23, 2020
- ASML NETHERLANDS B.V.
- Hrishikesh PATEL
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR