Renzo Capelli

Person

Traunstein, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method for measuring an effect of a wavelength-dependent measuring...
- Patent number 12,174,546
- Issue date Dec 24, 2024
- Carl Zeiss SMT GmbH
- Walter Pauls
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology system for examining objects with EUV measurement light
- Patent number 11,796,926
- Issue date Oct 24, 2023
- Carl Zeiss SMT GmbH
- Renzo Capelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for repairing defects of a photolithographic m...
- Patent number 11,774,848
- Issue date Oct 3, 2023
- Carl Zeiss SMT GmbH
- Hendrik Steigerwald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for repairing defects of a photolithographic m...
- Patent number 11,079,673
- Issue date Aug 3, 2021
- Carl Zeiss SMT GmbH
- Hendrik Steigerwald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining a structure-independent contribution of a li...
- Patent number 11,061,331
- Issue date Jul 13, 2021
- Carl Zeiss SMT GmbH
- Markus Koch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for examining photolithographic masks and mask metrology app...
- Patent number 10,775,691
- Issue date Sep 15, 2020
- Carl Zeiss SMT GmbH
- Dirk Hellweg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining a focus position of a lithography mask and m...
- Patent number 10,564,551
- Issue date Feb 18, 2020
- Carl Zeiss SMT GmbH
- Markus Koch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining an imaging aberration contribution of an ima...
- Patent number 10,481,505
- Issue date Nov 19, 2019
- Carl Zeiss SMT GmbH
- Markus Koch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and system for EUV mask blank buried defect analysis
- Patent number 10,055,833
- Issue date Aug 21, 2018
- Carl Zeiss SMT GmbH
- Jan Hendrik Peters
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR SIMULATING ILLUMINATION AND IMAGING PROPERTIES OF AN OPT...
- Publication number 20240361704
- Publication date Oct 31, 2024
- Carl Zeiss SMT GMBH
- Klaus Gwosch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR QUALIFYING A MASK FOR USE IN LITHOGRAPHY
- Publication number 20240085779
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Renzo Capelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METROLOGY SYSTEM FOR EXAMINING OBJECTS WITH EUV MEASUREMENT LIGHT
- Publication number 20230168593
- Publication date Jun 1, 2023
- Carl Zeiss SMT GMBH
- Renzo Capelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR INSPECTING A MASK FOR EUV LITHOGRAPHY
- Publication number 20230020107
- Publication date Jan 19, 2023
- Carl Zeiss SMT GMBH
- Renzo Capelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING AN IMAGING QUALITY OF AN OPTICAL SYSTEM WHEN...
- Publication number 20220390320
- Publication date Dec 8, 2022
- Carl Zeiss SMT GMBH
- Markus Koch
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING AN EFFECT OF A WAVELENGTH-DEPENDENT MEASURING...
- Publication number 20220350258
- Publication date Nov 3, 2022
- Carl Zeiss SMT GMBH
- Walter Pauls
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MEASURING A REFLECTIVITY OF AN OBJECT FOR MEASUREMENT LI...
- Publication number 20220236648
- Publication date Jul 28, 2022
- Carl Zeiss SMT GMBH
- Renzo Capelli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A PRODUCTION AERIAL IMAGE OF AN OBJECT TO BE...
- Publication number 20220101569
- Publication date Mar 31, 2022
- Carl Zeiss SMT GMBH
- Martin Dietzel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC M...
- Publication number 20210325775
- Publication date Oct 21, 2021
- Carl Zeiss SMT GMBH
- Hendrik Steigerwald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING AN IMAGING ABERRATION CONTRIBUTION OF AN IMA...
- Publication number 20190258170
- Publication date Aug 22, 2019
- Carl Zeiss SMT GMBH
- Markus Koch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A STRUCTURE-INDEPENDENT CONTRIBUTION OF A LI...
- Publication number 20190258176
- Publication date Aug 22, 2019
- Carl Zeiss SMT GMBH
- Markus Koch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A FOCUS POSITION OF A LITHOGRAPHY MASK AND M...
- Publication number 20190258180
- Publication date Aug 22, 2019
- Carl Zeiss SMT GMBH
- Markus Koch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR EXAMINING PHOTOLITHOGRAPHIC MASKS AND MASK METROLOGY APP...
- Publication number 20190079381
- Publication date Mar 14, 2019
- Carl Zeiss SMT GMBH
- Dirk Hellweg
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC M...
- Publication number 20180284600
- Publication date Oct 4, 2018
- Carl Ziess SMT GmbH
- Hendrik Steigerwald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR PRODUCING A MASK FOR THE EXTREME ULTRAVIOLET WAVELENGTH...
- Publication number 20170176851
- Publication date Jun 22, 2017
- Carl Zeiss SMT GMBH
- Jan-Hendrik Peters
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Method and System for EUV Mask Blank Buried Defect Analysis
- Publication number 20160169816
- Publication date Jun 16, 2016
- Carl Zeiss SMT GMBH
- Jan Hendrik Peters
- G01 - MEASURING TESTING

Renzo Capelli

Person

Patents Grantslast 30 patents

Method for measuring an effect of a wavelength-dependent measuring...

Metrology system for examining objects with EUV measurement light

Method and apparatus for repairing defects of a photolithographic m...

Method and apparatus for repairing defects of a photolithographic m...

Method for determining a structure-independent contribution of a li...

Method for examining photolithographic masks and mask metrology app...

Method for determining a focus position of a lithography mask and m...

Method for determining an imaging aberration contribution of an ima...

Method and system for EUV mask blank buried defect analysis

Patents Applicationslast 30 patents

METHOD FOR SIMULATING ILLUMINATION AND IMAGING PROPERTIES OF AN OPT...

METHOD AND APPARATUS FOR QUALIFYING A MASK FOR USE IN LITHOGRAPHY

METROLOGY SYSTEM FOR EXAMINING OBJECTS WITH EUV MEASUREMENT LIGHT

SYSTEM AND METHOD FOR INSPECTING A MASK FOR EUV LITHOGRAPHY

METHOD FOR DETERMINING AN IMAGING QUALITY OF AN OPTICAL SYSTEM WHEN...

METHOD FOR MEASURING AN EFFECT OF A WAVELENGTH-DEPENDENT MEASURING...

METHOD FOR MEASURING A REFLECTIVITY OF AN OBJECT FOR MEASUREMENT LI...

METHOD FOR DETERMINING A PRODUCTION AERIAL IMAGE OF AN OBJECT TO BE...

METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC M...

METHOD FOR DETERMINING AN IMAGING ABERRATION CONTRIBUTION OF AN IMA...

METHOD FOR DETERMINING A STRUCTURE-INDEPENDENT CONTRIBUTION OF A LI...

METHOD FOR DETERMINING A FOCUS POSITION OF A LITHOGRAPHY MASK AND M...

METHOD FOR EXAMINING PHOTOLITHOGRAPHIC MASKS AND MASK METROLOGY APP...

METHOD AND APPARATUS FOR REPAIRING DEFECTS OF A PHOTOLITHOGRAPHIC M...

METHOD FOR PRODUCING A MASK FOR THE EXTREME ULTRAVIOLET WAVELENGTH...

Method and System for EUV Mask Blank Buried Defect Analysis