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Reo Kosaka
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Hillsboro, OR, US
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last 30 patents
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Patent Grant
Pattern enhancement using a gas cluster ion beam
Patent number
11,450,506
Issue date
Sep 20, 2022
TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
Kazuya Dobashi
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Pattern Enhancement Using a Gas Cluster Ion Beam
Publication number
20210335568
Publication date
Oct 28, 2021
TOKYO ELECTRON LIMITED
Kazuya Dobashi
H01 - BASIC ELECTRIC ELEMENTS