-
WAFER PLACEMENT TABLE
-
Publication number 20230402306
-
Publication date Dec 14, 2023
-
NGK Insulators, Ltd.
-
Reo WATANABE
-
H01 - BASIC ELECTRIC ELEMENTS
-
WAFER PLACEMENT TABLE
-
Publication number 20220124874
-
Publication date Apr 21, 2022
-
NGK Insulators, Ltd.
-
Seiya INOUE
-
H01 - BASIC ELECTRIC ELEMENTS
-
WAFER PLACEMENT TABLE
-
Publication number 20220124875
-
Publication date Apr 21, 2022
-
NGK Insulators, Ltd.
-
Yuma IWATA
-
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
-
ELECTROSTATIC-CHUCK HEATER
-
Publication number 20200312696
-
Publication date Oct 1, 2020
-
NGK Insulators, Ltd.
-
Yutaka UNNO
-
H01 - BASIC ELECTRIC ELEMENTS
-
ELECTROSTATIC-CHUCK HEATER
-
Publication number 20200126773
-
Publication date Apr 23, 2020
-
NGK Insulators, Ltd.
-
Yutaka UNNO
-
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
-
ELECTROSTATIC CHUCK
-
Publication number 20200111697
-
Publication date Apr 9, 2020
-
NGK Insulators, Ltd.
-
Reo WATANABE
-
H01 - BASIC ELECTRIC ELEMENTS
-
WAFER SUSCEPTOR
-
Publication number 20190131163
-
Publication date May 2, 2019
-
NGK Insulators,Ltd.
-
Tatsuya KUNO
-
H01 - BASIC ELECTRIC ELEMENTS
-