Riccardo BINDA

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Erba, IT

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Patents Grantslast 30 patents

Information Patent Grant
Source-collector modules for EUV lithography employing a GIC mirror...
- Patent number 8,895,946
- Issue date Nov 25, 2014
- Media Lario S.r.l.
- Natale M. Ceglio
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
Source-collector modules for EUV lithography employing a GIC mirror...
- Publication number 20130207004
- Publication date Aug 15, 2013
- Media Lario, S.R.L.
- Natale M. Ceglio
- G02 - OPTICS