Richard A. Ferguson

Person

Pleasant Valley, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Binary OPC for assist feature layout optimization
- Patent number 7,147,976
- Issue date Dec 12, 2006
- International Business Machines Corporation
- Lars W. Liebmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Binary OPC for assist feature layout optimization
- Patent number 7,001,693
- Issue date Feb 21, 2006
- International Business Machines Corporation
- Lars W. Liebmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Asymmetric halftone biasing for sub-grid pattern adjustment
- Patent number 6,596,442
- Issue date Jul 22, 2003
- International Business Machines Corporation
- Alfred K. Wong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process window based optical proximity correction of lithographic i...
- Patent number 6,578,190
- Issue date Jun 10, 2003
- International Business Machines Corporation
- Richard A. Ferguson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Detection of phase defects on photomasks by differential imaging
- Patent number 6,327,033
- Issue date Dec 4, 2001
- International Business Machines Corporation
- Richard A. Ferguson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Kernel-based fast aerial image computation for a large scale design...
- Patent number 6,223,139
- Issue date Apr 24, 2001
- International Business Machines Corporation
- Alfred K. Wong
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming cornered images on a substrate and photomask for...
- Patent number 6,184,151
- Issue date Feb 6, 2001
- International Business Machines Corporation
- William J. Adair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining the printability of photomask defects
- Patent number 5,965,306
- Issue date Oct 12, 1999
- International Business Machines Corporation
- Scott Marshall Mansfield
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for forming cornered images on a substrate and photomask for...
- Patent number 5,959,325
- Issue date Sep 28, 1999
- International Business Machines Corporation
- William J. Adair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focus monitor for alternating phase shifted masks
- Patent number 5,936,738
- Issue date Aug 10, 1999
- International Business Machines Corporation
- Lars W. Liebmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exact transmission balanced alternating phase-shifting mask for pho...
- Patent number 5,932,377
- Issue date Aug 3, 1999
- International Business Machines Corporation
- Richard A. Ferguson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic patterning method and mask set therefor with light fie...
- Patent number 5,807,649
- Issue date Sep 15, 1998
- International Business Machines Corporation
- Lars W. Liebmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High resolution phase edge lithography without the need for a trim...
- Patent number 5,538,833
- Issue date Jul 23, 1996
- International Business Machines Corporation
- Richard A. Ferguson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Binary OPC for assist feature layout optimization
- Publication number 20060057475
- Publication date Mar 16, 2006
- Lars W. Liebmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Binary OPC for assist feature layout optimization
- Publication number 20040170905
- Publication date Sep 2, 2004
- International Business Machines Corporation
- Lars W. Liebmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Process window based optical proximity correction of lithographic i...
- Publication number 20020091986
- Publication date Jul 11, 2002
- International Business Machines Corporation
- Richard A. Ferguson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Richard A. Ferguson

Person

Patents Grantslast 30 patents

Binary OPC for assist feature layout optimization

Binary OPC for assist feature layout optimization

Asymmetric halftone biasing for sub-grid pattern adjustment

Process window based optical proximity correction of lithographic i...

Detection of phase defects on photomasks by differential imaging

Kernel-based fast aerial image computation for a large scale design...

Method for forming cornered images on a substrate and photomask for...

Method of determining the printability of photomask defects

Method for forming cornered images on a substrate and photomask for...

Focus monitor for alternating phase shifted masks

Exact transmission balanced alternating phase-shifting mask for pho...

Lithographic patterning method and mask set therefor with light fie...

High resolution phase edge lithography without the need for a trim...

Patents Applicationslast 30 patents

Binary OPC for assist feature layout optimization

Binary OPC for assist feature layout optimization

Process window based optical proximity correction of lithographic i...