Richard A. Gottscho

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated dry processes for patterning radiation photoresist patte...
- Patent number 12,183,604
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist development with halide chemistries
- Patent number 12,105,422
- Issue date Oct 1, 2024
- Lam Research Corporation
- Samantha Siamhwa Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Predicting etch characteristics in thermal etching and atomic layer...
- Patent number 11,520,953
- Issue date Dec 6, 2022
- Lam Research Corporation
- Thorsten Lill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma processing system having an inspection tool and controller t...
- Patent number 11,276,564
- Issue date Mar 15, 2022
- Lam Research Corporation
- Richard Alan Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect classification and source analysis for semiconductor equipment
- Patent number 11,263,737
- Issue date Mar 1, 2022
- Lam Research Corporation
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 11,209,729
- Issue date Dec 28, 2021
- Lam Research Corporation
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 10,831,096
- Issue date Nov 10, 2020
- Lam Research Corporation
- Jeffrey Marks
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Estimation of lifetime remaining for a consumable-part in a semicon...
- Patent number 10,697,874
- Issue date Jun 30, 2020
- Lam Research Corporation
- Richard Alan Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System implementing machine learning in complex multivariate wafer...
- Patent number 10,615,009
- Issue date Apr 7, 2020
- Lam Research Corporation
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Photoresist design layout pattern proximity correction through fast...
- Patent number 10,585,347
- Issue date Mar 10, 2020
- Lam Research Corporation
- Saravanapriyan Sriraman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 10,514,598
- Issue date Dec 24, 2019
- Lam Research Corporation
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems, methods and apparatus for choked flow element extraction
- Patent number 10,424,460
- Issue date Sep 24, 2019
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatuses for etch profile matching by surface kineti...
- Patent number 10,386,828
- Issue date Aug 20, 2019
- Lam Research Corporation
- Mehmet Derya Tetiker
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods for processing substrates using small plasma chambers
- Patent number 10,332,727
- Issue date Jun 25, 2019
- Lam Research Corporation
- Richard Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
- Patent number 10,303,830
- Issue date May 28, 2019
- Lam Research Corporation
- Mehmet Derya Tetiker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Distributed multi-zone plasma source systems, methods and apparatus
- Patent number 10,283,325
- Issue date May 7, 2019
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for monitoring plasma processing systems for advanced proce...
- Patent number 10,269,545
- Issue date Apr 23, 2019
- Lam Research Corporation
- Richard Alan Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist design layout pattern proximity correction through fast...
- Patent number 10,197,908
- Issue date Feb 5, 2019
- Lam Research Corporation
- Saravanapriyan Sriraman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Estimation of lifetime remaining for a consumable-part in a semicon...
- Patent number 10,041,868
- Issue date Aug 7, 2018
- Lam Research Corporation
- Richard Alan Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
- Patent number 9,996,647
- Issue date Jun 12, 2018
- Lam Research Corporation
- Mehmet Derya Tetiker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and process of implementing machine learning in complex mult...
- Patent number 9,972,478
- Issue date May 15, 2018
- Lam Research Corporation
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Direct current pulsing plasma systems
- Patent number 9,966,231
- Issue date May 8, 2018
- Lam Research Corporation
- Roderick W. Boswell
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Distributed, concentric multi-zone plasma source systems, methods a...
- Patent number 9,967,965
- Issue date May 8, 2018
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system having multiple decoupled plasma so...
- Patent number 9,947,557
- Issue date Apr 17, 2018
- Lam Research Corporation
- John Patrick Holland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Small plasma chamber systems and methods
- Patent number 9,911,578
- Issue date Mar 6, 2018
- Lam Research Corporation
- Richard Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for etch profile optimization by reflectanc...
- Patent number 9,792,393
- Issue date Oct 17, 2017
- Lam Research Corporation
- Mehmet Derya Tetiker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vacuum-integrated hardmask processes and apparatus
- Patent number 9,778,561
- Issue date Oct 3, 2017
- Lam Research Corporation
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems, methods and apparatus for choked flow element extraction
- Patent number 9,449,793
- Issue date Sep 20, 2016
- Lam Research Corporation
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributed multi-zone plasma source systems, methods and apparatus
- Patent number 9,155,181
- Issue date Oct 6, 2015
- Lam Research Corporation
- Ali Shajii
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Small plasma chamber systems and methods
- Patent number 9,111,729
- Issue date Aug 18, 2015
- Lam Research Corporation
- Richard Gottscho
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES
- Publication number 20240419078
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Samantha SiamHwa Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES
- Publication number 20240361696
- Publication date Oct 31, 2024
- LAM RESEARCH CORPORATION
- Samantha SiamHwa Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
- Publication number 20240145272
- Publication date May 2, 2024
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
- Publication number 20230290657
- Publication date Sep 14, 2023
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230273516
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20230266662
- Publication date Aug 24, 2023
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...
- Publication number 20230045336
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SORPTION CHAMBER WALLS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20220319821
- Publication date Oct 6, 2022
- Hossein Sadeghi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20220270237
- Publication date Aug 25, 2022
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES
- Publication number 20220244645
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Samantha SiamHwa Tan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20220075260
- Publication date Mar 10, 2022
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT
- Publication number 20200226742
- Publication date Jul 16, 2020
- LAM RESEARCH CORPORATION
- Kapil Sawlani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20200089104
- Publication date Mar 19, 2020
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREDICTING ETCH CHARACTERISTICS IN THERMAL ETCHING AND ATOMIC LAYER...
- Publication number 20190340316
- Publication date Nov 7, 2019
- LAM RESEARCH CORPORATION
- Thorsten Lill
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PHOTORESIST DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST...
- Publication number 20190250501
- Publication date Aug 15, 2019
- LAM RESEARCH CORPORATION
- Saravanapriyan Sriraman
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Plasma Processing System having an inspection tool and Controller t...
- Publication number 20190252163
- Publication date Aug 15, 2019
- LAM RESEARCH CORPORATION
- Richard Alan Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20190094685
- Publication date Mar 28, 2019
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
- Publication number 20190049937
- Publication date Feb 14, 2019
- LAM RESEARCH CORPORATION
- Mehmet Derya Tetiker
- G05 - CONTROLLING REGULATING
Information Patent Application
Estimation of Lifetime Remaining for a Consumable-Part in a Semicon...
- Publication number 20180372605
- Publication date Dec 27, 2018
- LAM RESEARCH CORPORATION
- Richard Alan Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
- Publication number 20180260509
- Publication date Sep 13, 2018
- Lam Research Corporation
- Mehmet Derya Tetiker
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
System Implementing Machine Learning in Complex Multivariate Wafer...
- Publication number 20180247798
- Publication date Aug 30, 2018
- LAM RESEARCH CORPORATION
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Processing System Having Multiple Decoupled Plasma So...
- Publication number 20180240686
- Publication date Aug 23, 2018
- LAM RESEARCH CORPORATION
- John Patrick Holland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...
- Publication number 20180228015
- Publication date Aug 9, 2018
- LAM RESEARCH CORPORATION
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for Processing Substrates Using Small Plasma Chambers
- Publication number 20180144906
- Publication date May 24, 2018
- LAM RESEARCH CORPORATION
- Richard Gottscho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Process of Implementing Machine Learning in Complex Mult...
- Publication number 20180082826
- Publication date Mar 22, 2018
- LAM RESEARCH CORPORATION
- Joydeep Guha
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Systems for Monitoring Plasma Processing Systems and Ad...
- Publication number 20180040460
- Publication date Feb 8, 2018
- LAM RESEARCH CORPORATION
- Richard Alan Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20180004083
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...
- Publication number 20170371991
- Publication date Dec 28, 2017
- LAM RESEARCH CORPORATION
- Mehmet Derya Tetiker
- G01 - MEASURING TESTING
Information Patent Application
PHOTORESIST DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST...
- Publication number 20170363950
- Publication date Dec 21, 2017
- LAM RESEARCH CORPORATION
- Saravanapriyan Sriraman
- G06 - COMPUTING CALCULATING COUNTING

Richard A. Gottscho

Person

Patents Grantslast 30 patents

Integrated dry processes for patterning radiation photoresist patte...

Photoresist development with halide chemistries

Predicting etch characteristics in thermal etching and atomic layer...

Plasma processing system having an inspection tool and controller t...

Defect classification and source analysis for semiconductor equipment

Vacuum-integrated hardmask processes and apparatus

Vacuum-integrated hardmask processes and apparatus

Estimation of lifetime remaining for a consumable-part in a semicon...

System implementing machine learning in complex multivariate wafer...

Photoresist design layout pattern proximity correction through fast...

Vacuum-integrated hardmask processes and apparatus

Systems, methods and apparatus for choked flow element extraction

Methods and apparatuses for etch profile matching by surface kineti...

Methods for processing substrates using small plasma chambers

Methods and apparatuses for etch profile optimization by reflectanc...

Distributed multi-zone plasma source systems, methods and apparatus

Methods for monitoring plasma processing systems for advanced proce...

Photoresist design layout pattern proximity correction through fast...

Estimation of lifetime remaining for a consumable-part in a semicon...

Methods and apparatuses for etch profile optimization by reflectanc...

Method and process of implementing machine learning in complex mult...

Direct current pulsing plasma systems

Distributed, concentric multi-zone plasma source systems, methods a...

Semiconductor processing system having multiple decoupled plasma so...

Small plasma chamber systems and methods

Methods and apparatuses for etch profile optimization by reflectanc...

Vacuum-integrated hardmask processes and apparatus

Systems, methods and apparatus for choked flow element extraction

Distributed multi-zone plasma source systems, methods and apparatus

Small plasma chamber systems and methods

Patents Applicationslast 30 patents

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES

PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

INTEGRATED DRY PROCESSES FOR PATTERNING RADIATION PHOTORESIST PATTE...

SORPTION CHAMBER WALLS FOR SEMICONDUCTOR EQUIPMENT

DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT

PHOTORESIST DEVELOPMENT WITH HALIDE CHEMISTRIES

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

DEFECT CLASSIFICATION AND SOURCE ANALYSIS FOR SEMICONDUCTOR EQUIPMENT

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

PREDICTING ETCH CHARACTERISTICS IN THERMAL ETCHING AND ATOMIC LAYER...

PHOTORESIST DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST...

Plasma Processing System having an inspection tool and Controller t...

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...

Estimation of Lifetime Remaining for a Consumable-Part in a Semicon...

METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...

System Implementing Machine Learning in Complex Multivariate Wafer...

Semiconductor Processing System Having Multiple Decoupled Plasma So...

Distributed, Non-Concentric Multi-Zone Plasma Source Systems, Metho...

Methods for Processing Substrates Using Small Plasma Chambers

Method and Process of Implementing Machine Learning in Complex Mult...

Methods and Systems for Monitoring Plasma Processing Systems and Ad...

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

METHODS AND APPARATUSES FOR ETCH PROFILE OPTIMIZATION BY REFLECTANC...

PHOTORESIST DESIGN LAYOUT PATTERN PROXIMITY CORRECTION THROUGH FAST...