Richard A. Marsh

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Austin, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Heater with shadow ring and purge above wafer surface
- Patent number 5,888,304
- Issue date Mar 30, 1999
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support shield in wafer processing reactors
- Patent number 5,855,687
- Issue date Jan 5, 1999
- Applied Materials, Inc.
- Dale R. DuBois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Removable ring for controlling edge deposition in substrate process...
- Patent number 5,766,365
- Issue date Jun 16, 1998
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...