Richard A. Yarussi

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Scanning focal length metrology
- Patent number 8,259,297
- Issue date Sep 4, 2012
- Nanometrics Incorporated
- Richard A. Yarussi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning focal length metrology
- Patent number 8,259,296
- Issue date Sep 4, 2012
- Nanometrics Incorporated
- Richard A. Yarussi
- G01 - MEASURING TESTING
Information Patent Grant
Scanning focal length metrology
- Patent number 7,697,135
- Issue date Apr 13, 2010
- Nanometrics Incorporated
- Richard A. Yarussi
- G01 - MEASURING TESTING
Information Patent Grant
Spectrometer measurement of diffracting structures
- Patent number 7,372,565
- Issue date May 13, 2008
- Nanometrics Incorporated
- James M. Holden
- G01 - MEASURING TESTING
Information Patent Grant
Metrology/inspection positioning system
- Patent number 7,295,314
- Issue date Nov 13, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G01 - MEASURING TESTING
Information Patent Grant
Image control in a metrology/inspection positioning system
- Patent number 7,289,215
- Issue date Oct 30, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G02 - OPTICS
Information Patent Grant
Apparatus and method for the measurement of diffracting structures
- Patent number 7,115,858
- Issue date Oct 3, 2006
- Nanometrics Incorporated
- James M. Holden
- G01 - MEASURING TESTING
Information Patent Grant
Alignment of a rotatable polarizer with a sample
- Patent number 6,665,070
- Issue date Dec 16, 2003
- Nanometrics Incorporated
- Richard A. Yarussi
- G01 - MEASURING TESTING
Information Patent Grant
Correcting the system polarization sensitivity of a metrology tool...
- Patent number 6,522,406
- Issue date Feb 18, 2003
- Nanometrics Incorporated
- Pablo I. Rovira
- G01 - MEASURING TESTING
Information Patent Grant
System using a polar coordinate stage and continuous image rotation...
- Patent number 6,320,609
- Issue date Nov 20, 2001
- Nanometrics Incorporated
- Robert Buchanan
- G02 - OPTICS
Information Patent Grant
Compact optical reflectometer system
- Patent number 6,181,427
- Issue date Jan 30, 2001
- Nanometrics Incorporated
- Richard A. Yarussi
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IMAGE CONTROL IN A METROLOGY/INSPECTION POSITIONING SYSTEM
- Publication number 20070222991
- Publication date Sep 27, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G02 - OPTICS

Richard A. Yarussi

Person

Patents Grantslast 30 patents

Scanning focal length metrology

Scanning focal length metrology

Scanning focal length metrology

Spectrometer measurement of diffracting structures

Metrology/inspection positioning system

Image control in a metrology/inspection positioning system

Apparatus and method for the measurement of diffracting structures

Alignment of a rotatable polarizer with a sample

Correcting the system polarization sensitivity of a metrology tool...

System using a polar coordinate stage and continuous image rotation...

Compact optical reflectometer system

Patents Applicationslast 30 patents

IMAGE CONTROL IN A METROLOGY/INSPECTION POSITIONING SYSTEM