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Richard BEAUDRY
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Shefford, CA
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Patents Grants
last 30 patents
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Patent Grant
Pellicle for EUV lithography
Patent number
11,977,326
Issue date
May 7, 2024
ASML Netherlands B.V.
Dennis De Graaf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
PELLICLE FOR EUV LITHOGRAPHY
Publication number
20240302736
Publication date
Sep 12, 2024
ASML NETHERLANDS B.V.
Dennis DE GRAAF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
PELLICLE FOR EUV LITHOGRAPHY
Publication number
20210240070
Publication date
Aug 5, 2021
ASML NETHERLANDS B.V.
Dennis DE GRAAF
H01 - BASIC ELECTRIC ELEMENTS