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Richard Bryan LEWIS
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Rye, NY, US
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus, substrate table, and non-uniform coating me...
Patent number
11,887,881
Issue date
Jan 30, 2024
ASML Holding N.V.
Bruce Tirri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Burls with altered surface topography for holding an object in lith...
Patent number
11,270,906
Issue date
Mar 8, 2022
ASML Holding N.V.
Mehmet Ali Akbas
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE TABLE, AND NON-UNIFORM COATING ME...
Publication number
20220216092
Publication date
Jul 7, 2022
ASML Holding N.V.
Bruce TIRRI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BURLS WITH ALTERED SURFACE TOPOGRAPHY FOR HOLDING AN OBJECT IN LITH...
Publication number
20210202293
Publication date
Jul 1, 2021
ASML Holding N.V.
Mehmet Ali AKBAS
H01 - BASIC ELECTRIC ELEMENTS