Richard C. Heim

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Modular processing apparatus for processing semiconductor wafers
- Patent number 4,852,516
- Issue date Aug 1, 1989
- Machine Technology, Inc.
- Richard H. Rubin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular processing apparatus for processing semiconductor wafers
- Patent number 4,722,298
- Issue date Feb 2, 1988
- Machine Technology, Inc.
- Richard H. Rubin
- H01 - BASIC ELECTRIC ELEMENTS