Richard D. Edwards

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Prioritizing an application of correction in a multi-input control...
- Patent number 6,912,436
- Issue date Jun 28, 2005
- Advanced Micro Devices, Inc.
- Gary Jones
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for overlay control using multiple targets
- Patent number 6,815,232
- Issue date Nov 9, 2004
- Advanced Micro Devices, Inc.
- Gary K Jones
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using critical dimension measurements to control stepper...
- Patent number 6,808,946
- Issue date Oct 26, 2004
- Advanced Micro Devices, Inc.
- James Broc Stirton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of using scatterometry measurements to control stepper proce...
- Patent number 6,790,570
- Issue date Sep 14, 2004
- Advanced Micro Devices, Inc.
- James Broc Stirton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for run-to-run controlling of overlay registra...
- Patent number 6,622,061
- Issue date Sep 16, 2003
- Advanced Micro Devices, Inc.
- Anthony J. Toprac
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for parsing event logs to determine tool opera...
- Patent number 6,564,171
- Issue date May 13, 2003
- Advanced Micro Devices Inc.
- Anastasia Oshelski Peterson
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and apparatus for controlling a stepper
- Patent number 6,551,751
- Issue date Apr 22, 2003
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for controlling and monitoring light source intensity
- Patent number 6,440,622
- Issue date Aug 27, 2002
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for controlling optical-parameters in a stepper
- Patent number 6,417,912
- Issue date Jul 9, 2002
- Advanced Micro Devices, Inc.
- Scott Bushman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for run-to-run controlling of overlay registra...
- Patent number 6,405,096
- Issue date Jun 11, 2002
- Advanced Micro Devices, Inc.
- Anthony J. Toprac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for reducing the susceptibility to chemical-mechanical polis...
- Patent number 6,271,602
- Issue date Aug 7, 2001
- Advanced Micro Devices, Inc.
- Paul W. Ackmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stepper with exposure time monitor
- Patent number 6,266,132
- Issue date Jul 24, 2001
- Advanced Micro Devices, Inc.
- Edward C. Stewart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mark protection with transparent film
- Patent number 6,207,966
- Issue date Mar 27, 2001
- Advanced Micro Devices, Inc.
- Khanh B. Nguyen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Automated data management system for analysis and control of photol...
- Patent number 5,757,673
- Issue date May 26, 1998
- Advanced Micro Devices, Inc.
- Anastasia L. Osheiski
- G05 - CONTROLLING REGULATING
Information Patent Grant
Automated data management system for analysis and control of photol...
- Patent number 5,586,059
- Issue date Dec 17, 1996
- Advanced Micro Devices, Inc.
- Anastasia L. Oshelski
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for overlay control using multiple targets
- Publication number 20040101983
- Publication date May 27, 2004
- Gary K. Jones
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for controlling a stepper
- Publication number 20020186358
- Publication date Dec 12, 2002
- Advanced Micro Devices, Inc.
- Anthony John Toprac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for controlling a stepper
- Publication number 20020064719
- Publication date May 30, 2002
- Anthony John Toprac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Richard D. Edwards

Person

Patents Grantslast 30 patents

Prioritizing an application of correction in a multi-input control...

Method and apparatus for overlay control using multiple targets

Method of using critical dimension measurements to control stepper...

Method of using scatterometry measurements to control stepper proce...

Method and apparatus for run-to-run controlling of overlay registra...

Method and apparatus for parsing event logs to determine tool opera...

Method and apparatus for controlling a stepper

Method for controlling and monitoring light source intensity

Method and apparatus for controlling optical-parameters in a stepper

Method and apparatus for run-to-run controlling of overlay registra...

Method for reducing the susceptibility to chemical-mechanical polis...

Stepper with exposure time monitor

Mark protection with transparent film

Automated data management system for analysis and control of photol...

Automated data management system for analysis and control of photol...

Patents Applicationslast 30 patents

Method and apparatus for overlay control using multiple targets

Method and apparatus for controlling a stepper

Method and apparatus for controlling a stepper