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Richard E. Demerary
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Portola Valley, CA, US
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Patent Application
Rare-earth pre-alloyed PVD targets for dielectric planar applications
Publication number
20030175142
Publication date
Sep 18, 2003
Vassiliki Milonopoulou
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...