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Richard E. Wistrom
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Essex Junction, VT, US
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Patents Grants
last 30 patents
Information
Patent Grant
Photomask blank including a thin chromium hardmask
Patent number
10,168,612
Issue date
Jan 1, 2019
GLOBALFOUNDRIES Inc.
Richard Wistrom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Mask substrate structure
Patent number
9,964,847
Issue date
May 8, 2018
GLOBALFOUNDRIES Inc.
Richard Wistrom
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for adjusting lithographic mask flatness using thermally ind...
Patent number
7,355,680
Issue date
Apr 8, 2008
International Business Machines Corporation
Emily F. Gallagher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Detection of hardmask removal using a selective etch
Patent number
6,989,105
Issue date
Jan 24, 2006
International Business Machines Corporation
Jeffrey P. Gambino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor and method of fabricating
Patent number
6,391,661
Issue date
May 21, 2002
International Business Machines, Corp.
Daniel S. Brooks
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor and method of fabricating
Patent number
6,229,155
Issue date
May 8, 2001
International Business Machines Corporation
Daniel S. Brooks
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
PHOTOMASK BLANK INCLUDING A THIN CHROMIUM HARDMASK
Publication number
20180164674
Publication date
Jun 14, 2018
GLOBALFOUNDRIES INC.
Richard Wistrom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK SUBSTRATE STRUCTURE
Publication number
20170365471
Publication date
Dec 21, 2017
GLOBALFOUNDRIES INC.
Richard Wistrom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR ADJUSTING LITHOGRAPHIC MASK FLATNESS USING THERMALLY IND...
Publication number
20060146313
Publication date
Jul 6, 2006
International Business Machines Corporation
Emily F. Gallagher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DETECTION OF HARDMASK REMOVAL USING A SELECTIVE ETCH
Publication number
20040262256
Publication date
Dec 30, 2004
International Business Machines Corporation
Jeffrey P. Gambino
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor and method of fabricating
Publication number
20010016362
Publication date
Aug 23, 2001
International Business Machines Corporation
Daniel S. Brooks
H01 - BASIC ELECTRIC ELEMENTS