Richard F. Shuman

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Concord, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for reducing differential sputter rates
- Patent number 6,641,705
- Issue date Nov 4, 2003
- FEI Company
- Michael Phaneuf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for milling copper interconnects in a charged...
- Patent number 6,322,672
- Issue date Nov 27, 2001
- FEI Company
- Richard F. Shuman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for reducing differential sputter rates
- Publication number 20010053605
- Publication date Dec 20, 2001
- Michael Phaneuf
- H01 - BASIC ELECTRIC ELEMENTS