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Richard Goldberg
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Boston, MA, US
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last 30 patents
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Patent Grant
Method for extending equipment uptime in ion implantation
Patent number
7,875,125
Issue date
Jan 25, 2011
Semequip, Inc.
Kevin S. Cook
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD FOR EXTENDING EQUIPMENT UPTIME IN ION IMPLANTATION
Publication number
20090081874
Publication date
Mar 26, 2009
Kevin S. Cook
B08 - CLEANING