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Richard Goldberg
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Oslo, NO
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last 30 patents
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Patent Grant
External cathode ion source
Patent number
8,502,161
Issue date
Aug 6, 2013
Semequip, Inc.
Sami K. Hahto
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
EXTERNAL CATHODE ION SOURCE
Publication number
20100320395
Publication date
Dec 23, 2010
SemEquip, Inc.
Sami K. Hahto
H01 - BASIC ELECTRIC ELEMENTS