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Richard Graetz
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Mountain View, CA, US
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last 30 patents
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Patent Grant
All surface film metrology system
Patent number
10,563,973
Issue date
Feb 18, 2020
KLA-Tencor Corporation
Shifang Li
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
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Patent Application
ALL SURFACE FILM METROLOGY SYSTEM
Publication number
20170278236
Publication date
Sep 28, 2017
KLA-Tencor Corporation
Shifang Li
G01 - MEASURING TESTING