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Richard Gueler
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Santa Rosa, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Workpiece transfer device
Patent number
7,344,352
Issue date
Mar 18, 2008
Axcelis Technologies, Inc.
Richard Gueler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Uniform gas cushion wafer support
Patent number
7,070,661
Issue date
Jul 4, 2006
Axcelis Technologies, Inc.
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for positioning an elevator tube
Patent number
7,026,581
Issue date
Apr 11, 2006
Axcelis Technologies, Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Work-piece treatment system having load lock and buffer
Patent number
7,010,388
Issue date
Mar 7, 2006
Axcelis Technologies, Inc.
Robert J. Mitchell
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Workpiece transfer device
Publication number
20070065267
Publication date
Mar 22, 2007
Richard Gueler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of positioning an elevator tube
Publication number
20050042807
Publication date
Feb 24, 2005
Axcelis Technologies, Inc.
Michel Pharand
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Uniform gas cushion wafer support
Publication number
20050039685
Publication date
Feb 24, 2005
Axcelis Technologies, Inc.
Ari Eiriksson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Work-piece treatment system having load lock and buffer
Publication number
20040234359
Publication date
Nov 25, 2004
Axcelis Technologies, Inc.
Robert J. Mitchell
H01 - BASIC ELECTRIC ELEMENTS