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Richard H. Broberg
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Wellesley, MA, US
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last 30 patents
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Patent Grant
Methods for normalizing error in photolithographic processes
Patent number
7,957,826
Issue date
Jun 7, 2011
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
METHODS AND SYSTEMS FOR NORMALIZING ERROR
Publication number
20090053627
Publication date
Feb 26, 2009
International Business Machines Corporation
Christopher P. Ausschnitt
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY