Richard H. Stulen

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Livermore, Alameda County, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Self-cleaning optic for extreme ultraviolet lithography
- Patent number 6,664,554
- Issue date Dec 16, 2003
- EUV LLC
- Leonard E. Klebanoff
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Mitigation of radiation induced surface contamination
- Patent number 6,533,952
- Issue date Mar 18, 2003
- EUV LLC
- Leonard E. Klebanoff
- B08 - CLEANING
Information Patent Grant
Removable pellicle for lithographic mask protection and handling
- Patent number 6,492,067
- Issue date Dec 10, 2002
- EUV LLC
- Leonard E. Klebanoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for maskless lithography
- Patent number 6,060,224
- Issue date May 9, 2000
- William C. Sweatt
- G02 - OPTICS
Information Patent Grant
Maskless lithography
- Patent number 5,870,176
- Issue date Feb 9, 1999
- Sandia Corporation
- William C. Sweatt
- G02 - OPTICS
Information Patent Grant
Manipulator having thermally conductive rotary joint for transferri...
- Patent number 4,538,068
- Issue date Aug 27, 1985
- The United States of America as represented by the United States Department o...
- Steven J. Haney
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS

Patents Applicationslast 30 patents

Information Patent Application
Self-cleaning optic for extreme ultraviolet lithography
- Publication number 20020084425
- Publication date Jul 4, 2002
- Leonard E. Klebanoff
- B82 - NANO-TECHNOLOGY
Information Patent Application
MITIGATION OF RADIATION INDUCED SURFACE CONTAMINATION
- Publication number 20010053414
- Publication date Dec 20, 2001
- LEONARD E. KLEBANOFF
- B08 - CLEANING