Richard J. Hertel

Person

Bradford, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate halo arrangement for improved process uniformity
- Patent number 12,106,943
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,600,616
- Issue date Mar 24, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low particle capacitively coupled components for workpiece processing
- Patent number 10,276,340
- Issue date Apr 30, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Morgan D. Evans
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radio frequency extraction system for charge neutralized ion beam
- Patent number 10,224,181
- Issue date Mar 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,128,082
- Issue date Nov 13, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection system for ion beam device
- Patent number 10,062,548
- Issue date Aug 28, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 10,004,133
- Issue date Jun 19, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas injection system for ion beam device
- Patent number 9,865,433
- Issue date Jan 9, 2018
- Varian Semiconductor Equipment Associats, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and techniques to treat substrates using directional plas...
- Patent number 9,706,634
- Issue date Jul 11, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for efficient materials use during substrate p...
- Patent number 9,589,769
- Issue date Mar 7, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Vijayakumar C. Venugopal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for clamping and cooling a substrate for ion i...
- Patent number 9,520,264
- Issue date Dec 13, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for holding a plurality of substrates for proc...
- Patent number 9,218,990
- Issue date Dec 22, 2015
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for removing a vertically-oriented substrate f...
- Patent number 9,070,730
- Issue date Jun 30, 2015
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Dual sided workpiece handling
- Patent number 8,941,082
- Issue date Jan 27, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Richard J. Hertel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Media carrier
- Patent number 8,746,666
- Issue date Jun 10, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Richard Hertel
- G11 - INFORMATION STORAGE
Information Patent Grant
Method and apparatus for lifting a horizontally-oriented substrate...
- Patent number 8,585,115
- Issue date Nov 19, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual sided workpiece handling
- Patent number 8,563,407
- Issue date Oct 22, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Richard J. Hertel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for manipulating a substrate
- Patent number 8,550,520
- Issue date Oct 8, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer retaining platen having peripheral clamp and wafer lifting means
- Patent number 5,350,427
- Issue date Sep 27, 1994
- Varian Associates, Inc.
- Avrum Freytsis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for retaining wafers
- Patent number 5,040,484
- Issue date Aug 20, 1991
- Varian Associates, Inc.
- Eric L. Mears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid flow sensor with flexible vane
- Patent number 4,931,776
- Issue date Jun 5, 1990
- Varian Associates, Inc.
- Leo V. Klos
- G01 - MEASURING TESTING
Information Patent Grant
Disk scanning apparatus for batch ion implanters
- Patent number 4,899,059
- Issue date Feb 6, 1990
- Varian Associates, Inc.
- Avrum Freytsis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system
- Patent number 4,836,733
- Issue date Jun 6, 1989
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for retaining wafers
- Patent number 4,817,556
- Issue date Apr 4, 1989
- Varian Associates, Inc.
- Eric L. Mears
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low deflection force sensitive pick
- Patent number 4,744,709
- Issue date May 17, 1988
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system
- Patent number 4,634,331
- Issue date Jan 6, 1987
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple wafer holder for a wafer transfer system
- Patent number 4,602,713
- Issue date Jul 29, 1986
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer orientation system
- Patent number 4,498,833
- Issue date Feb 12, 1985
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system
- Patent number 4,449,885
- Issue date May 22, 1984
- Varian Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY
- Publication number 20220384156
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Jay R. Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY
- Publication number 20190272983
- Publication date Sep 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20190006149
- Publication date Jan 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOVABLE SUBSTRATE PLANE STRUCTURE RING
- Publication number 20180122670
- Publication date May 3, 2018
- Ernest E. Allen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170311430
- Publication date Oct 26, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM
- Publication number 20170309453
- Publication date Oct 26, 2017
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS INJECTION SYSTEM FOR ION BEAM DEVICE
- Publication number 20170062185
- Publication date Mar 2, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jay Wallace
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170042010
- Publication date Feb 9, 2017
- Shurong Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...
- Publication number 20170025252
- Publication date Jan 26, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Shurong Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR EFFICIENT MATERIALS USE DURING SUBSTRATE P...
- Publication number 20160013030
- Publication date Jan 14, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Vijayakumar C. Venugopal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL SIDED WORKPIECE HANDLING
- Publication number 20140014854
- Publication date Jan 16, 2014
- VARIAN SEMICONDUTOR EQUIPMENT ASSOCIATES, INC.
- Richard J. Hertel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Clamping and Cooling a Substrate for ION I...
- Publication number 20130240759
- Publication date Sep 19, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE F...
- Publication number 20130089395
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR LIFTING A HORIZONTALLY-ORIENTED SUBSTRATE...
- Publication number 20130088028
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR HOLDING A PLURALITY OF SUBSTRATES FOR PROC...
- Publication number 20130089403
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MANIPULATING A SUBSTRATE
- Publication number 20130088030
- Publication date Apr 11, 2013
- Varian Semiconductor Equipment Associates, Inc.
- John Robert Fairhurst
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEDIA CARRIER
- Publication number 20120280442
- Publication date Nov 8, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Richard J. Hertel
- G11 - INFORMATION STORAGE
Information Patent Application
DUAL SIDED WORKPIECE HANDLING
- Publication number 20100260943
- Publication date Oct 14, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Richard J. HERTEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma Source with Liner for Reducing Metal Contamination
- Publication number 20080169183
- Publication date Jul 17, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Richard J. Hertel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for enabling multiple process steps on a sing...
- Publication number 20060258128
- Publication date Nov 16, 2006
- Peter Nunan
- H01 - BASIC ELECTRIC ELEMENTS

Richard J. Hertel

Person

Patents Grantslast 30 patents

Substrate halo arrangement for improved process uniformity

Apparatus and techniques to treat substrates using directional plas...

Low particle capacitively coupled components for workpiece processing

Radio frequency extraction system for charge neutralized ion beam

Apparatus and techniques to treat substrates using directional plas...

Gas injection system for ion beam device

Apparatus and techniques to treat substrates using directional plas...

Gas injection system for ion beam device

Apparatus and techniques to treat substrates using directional plas...

Apparatus and method for efficient materials use during substrate p...

Method and apparatus for clamping and cooling a substrate for ion i...

Method and apparatus for holding a plurality of substrates for proc...

Method and apparatus for removing a vertically-oriented substrate f...

Dual sided workpiece handling

Media carrier

Method and apparatus for lifting a horizontally-oriented substrate...

Dual sided workpiece handling

Method and apparatus for manipulating a substrate

Wafer retaining platen having peripheral clamp and wafer lifting means

Apparatus for retaining wafers

Fluid flow sensor with flexible vane

Disk scanning apparatus for batch ion implanters

Wafer transfer system

Apparatus for retaining wafers

Low deflection force sensitive pick

Wafer transfer system

Multiple wafer holder for a wafer transfer system

Wafer orientation system

Wafer transfer system

Patents Applicationslast 30 patents

SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY

SUBSTRATE HALO ARRANGEMENT FOR IMPROVED PROCESS UNIFORMITY

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

REMOVABLE SUBSTRATE PLANE STRUCTURE RING

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

RADIO FREQUENCY EXTRACTION SYSTEM FOR CHARGE NEUTRALIZED ION BEAM

GAS INJECTION SYSTEM FOR ION BEAM DEVICE

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

APPARATUS AND TECHNIQUES TO TREAT SUBSTRATES USING DIRECTIONAL PLAS...

APPARATUS AND METHOD FOR EFFICIENT MATERIALS USE DURING SUBSTRATE P...

DUAL SIDED WORKPIECE HANDLING

Method and Apparatus for Clamping and Cooling a Substrate for ION I...

METHOD AND APPARATUS FOR REMOVING A VERTICALLY-ORIENTED SUBSTRATE F...

METHOD AND APPARATUS FOR LIFTING A HORIZONTALLY-ORIENTED SUBSTRATE...

METHOD AND APPARATUS FOR HOLDING A PLURALITY OF SUBSTRATES FOR PROC...

METHOD AND APPARATUS FOR MANIPULATING A SUBSTRATE

MEDIA CARRIER

DUAL SIDED WORKPIECE HANDLING

Plasma Source with Liner for Reducing Metal Contamination

Methods and apparatus for enabling multiple process steps on a sing...