Richard J. Markle

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for dynamically determining tester recipes
- Patent number 7,774,670
- Issue date Aug 10, 2010
- GLOBALFOUNDRIES Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for modifying process selectivities based on p...
- Patent number 7,695,986
- Issue date Apr 13, 2010
- GLOBALFOUNDRIES, INC.
- Matthew A. Purdy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for dynamic adjustment of sensor and/or metrol...
- Patent number 7,502,702
- Issue date Mar 10, 2009
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for dynamic adjustment of a sampling plan base...
- Patent number 7,445,945
- Issue date Nov 4, 2008
- Advanced Micro Devices, Inc.
- Richard J. Markle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma state monitoring to control etching processes and across-waf...
- Patent number 7,402,257
- Issue date Jul 22, 2008
- Advanced Micro Devices, Inc.
- Thomas J. Sonderman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for coordinating fault detection settings and...
- Patent number 7,337,091
- Issue date Feb 26, 2008
- Advanced Micro Devices, Inc.
- Richard J. Markle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fault detection classification of multiple...
- Patent number 7,321,993
- Issue date Jan 22, 2008
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G05 - CONTROLLING REGULATING
Information Patent Grant
Total tool control for semiconductor manufacturing
- Patent number 7,292,959
- Issue date Nov 6, 2007
- Advanced Mirco Devices, Inc.
- Richard J. Markle
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Automated integrated circuit device manufacturing facility using di...
- Patent number 7,289,867
- Issue date Oct 30, 2007
- Advanced Micro Devices, Inc.
- Richard J. Markle
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for determining grid dimensions using scattero...
- Patent number 7,262,864
- Issue date Aug 28, 2007
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Automated integrated circuit device manufacturing facility using ce...
- Patent number 7,257,458
- Issue date Aug 14, 2007
- Advanced Micro Devices, Inc.
- Richard J. Markle
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Secondary process controller for supplementing a primary process co...
- Patent number 7,254,453
- Issue date Aug 7, 2007
- Advanced Micro Devices, Inc.
- Richard J. Markle
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for calibrating degradable components using pr...
- Patent number 7,153,709
- Issue date Dec 26, 2006
- Advanced Micro Devices, Inc.
- Matthew A. Purdy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fault classification based on residual vec...
- Patent number 7,100,081
- Issue date Aug 29, 2006
- Advanced Micro Devices, Inc.
- Matthew A. Purdy
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Conflict resolution among multiple controllers
- Patent number 7,031,793
- Issue date Apr 18, 2006
- Advanced Micro Devices, Inc.
- Naomi M. Jenkins
- G05 - CONTROLLING REGULATING
Information Patent Grant
Fault detection spanning multiple processes
- Patent number 6,991,945
- Issue date Jan 31, 2006
- Advanced Micro Devices, Inc.
- Howard E. Castle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Verifying a fault detection result based on a process control state
- Patent number 6,988,225
- Issue date Jan 17, 2006
- Advanced Micro Devices, Inc.
- Matthew A. Purdy
- G05 - CONTROLLING REGULATING
Information Patent Grant
Fault detection and control methodologies for ion implantation proc...
- Patent number 6,960,774
- Issue date Nov 1, 2005
- Advanced Micro Devices, Inc.
- Elfido Coss, Jr.
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process control based on an estimated process result
- Patent number 6,925,347
- Issue date Aug 2, 2005
- Advanced Micro Devices, Inc.
- Michael L. Miller
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for modifying design constraints based on obse...
- Patent number 6,907,369
- Issue date Jun 14, 2005
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for determining electromagnetic properties of...
- Patent number 6,875,622
- Issue date Apr 5, 2005
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Methods of controlling formation of metal silicide regions, and sys...
- Patent number 6,815,235
- Issue date Nov 9, 2004
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for determining contact opening dimensions usi...
- Patent number 6,804,014
- Issue date Oct 12, 2004
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Various methods of controlling conformal film deposition processes,...
- Patent number 6,794,299
- Issue date Sep 21, 2004
- Advanced Micro Devices Inc.
- Richard J. Markle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process control based upon weight or mass measurements, and systems...
- Patent number 6,790,376
- Issue date Sep 14, 2004
- Advanced Micro Devices, Inc.
- Richard J. Markle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of controlling wet chemical processes in forming metal sili...
- Patent number 6,790,683
- Issue date Sep 14, 2004
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for performing overlay measurements using scat...
- Patent number 6,716,646
- Issue date Apr 6, 2004
- Advanced Micro Devices, Inc.
- Marilyn I. Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for controlling a process tool
- Patent number 6,701,206
- Issue date Mar 2, 2004
- Advanced Micro Devices, Inc.
- Richard J. Markle
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method for determining process layer thickness using scatterometry...
- Patent number 6,677,170
- Issue date Jan 13, 2004
- Advanced Micro Devices, Inc.
- Richard J. Markle
- G01 - MEASURING TESTING
Information Patent Grant
Adjustable wafer stage, and a method and system for performing proc...
- Patent number 6,660,651
- Issue date Dec 9, 2003
- Advanced Micro Devices, Inc.
- Richard J. Markle
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR DYNAMICALLY DETERMINING TESTER RECIPES
- Publication number 20090070644
- Publication date Mar 12, 2009
- RICHARD J. MARKLE
- G01 - MEASURING TESTING
Information Patent Application
Method and system for calibrating integrated metrology systems and...
- Publication number 20060058979
- Publication date Mar 16, 2006
- Richard J. Markle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Fault detection and control methodologies for ion implantation proc...
- Publication number 20050092939
- Publication date May 5, 2005
- Elfido Coss
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Secondary process controller for supplementing a primary process co...
- Publication number 20040102857
- Publication date May 27, 2004
- Richard J. Markle
- G05 - CONTROLLING REGULATING
Information Patent Application
Use of a gettering agent in a chemical mechanical polishing and rin...
- Publication number 20040011991
- Publication date Jan 22, 2004
- Richard J. Markle
- B24 - GRINDING POLISHING

Richard J. Markle

Person

Patents Grantslast 30 patents

Method and apparatus for dynamically determining tester recipes

Method and apparatus for modifying process selectivities based on p...

Method and apparatus for dynamic adjustment of sensor and/or metrol...

Method and apparatus for dynamic adjustment of a sampling plan base...

Plasma state monitoring to control etching processes and across-waf...

Method and apparatus for coordinating fault detection settings and...

Method and apparatus for fault detection classification of multiple...

Total tool control for semiconductor manufacturing

Automated integrated circuit device manufacturing facility using di...

Method and apparatus for determining grid dimensions using scattero...

Automated integrated circuit device manufacturing facility using ce...

Secondary process controller for supplementing a primary process co...

Method and apparatus for calibrating degradable components using pr...

Method and apparatus for fault classification based on residual vec...

Conflict resolution among multiple controllers

Fault detection spanning multiple processes

Verifying a fault detection result based on a process control state

Fault detection and control methodologies for ion implantation proc...

Process control based on an estimated process result

Method and apparatus for modifying design constraints based on obse...

Method and apparatus for determining electromagnetic properties of...

Methods of controlling formation of metal silicide regions, and sys...

Method and apparatus for determining contact opening dimensions usi...

Various methods of controlling conformal film deposition processes,...

Process control based upon weight or mass measurements, and systems...

Methods of controlling wet chemical processes in forming metal sili...

Method and apparatus for performing overlay measurements using scat...

Method and system for controlling a process tool

Method for determining process layer thickness using scatterometry...

Adjustable wafer stage, and a method and system for performing proc...

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR DYNAMICALLY DETERMINING TESTER RECIPES

Method and system for calibrating integrated metrology systems and...

Fault detection and control methodologies for ion implantation proc...

Secondary process controller for supplementing a primary process co...

Use of a gettering agent in a chemical mechanical polishing and rin...