Richard J. Rzeszut

Person

Billerica, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Hydrogen generator for an ion implanter
- Patent number 11,276,543
- Issue date Mar 15, 2022
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hydrogen generator for an ion implanter
- Patent number 10,847,339
- Issue date Nov 24, 2020
- Axcelis Technologies, Inc.
- Neil K Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Implantation using solid aluminum iodide (ALI3) for producing atomi...
- Patent number 10,774,419
- Issue date Sep 15, 2020
- Axcelis Technologies, Inc.
- Dennis Elliott Kamenitsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Implantation using solid aluminum iodide (AlI3) for producing atomi...
- Patent number 10,087,520
- Issue date Oct 2, 2018
- Axcelis Technologies, Inc.
- Dennis Elliott Kamenitsa
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
De-clamping wafers from an electrostatic chuck
- Patent number 8,270,142
- Issue date Sep 18, 2012
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with compliant coat
- Patent number 8,023,247
- Issue date Sep 20, 2011
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Bulk gas delivery system for ion implanters
- Patent number 6,515,290
- Issue date Feb 4, 2003
- Axcelis Technologies, Inc.
- Richard J. Rzeszut
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HYDROGEN GENERATOR FOR AN ION IMPLANTER
- Publication number 20210090841
- Publication date Mar 25, 2021
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROGEN GENERATOR FOR AN ION IMPLANTER
- Publication number 20190228943
- Publication date Jul 25, 2019
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMI...
- Publication number 20170362699
- Publication date Dec 21, 2017
- Axcelis Technologies, Inc.
- Dennis Elliott Kamenitsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMI...
- Publication number 20170362700
- Publication date Dec 21, 2017
- Axcelis Technologies, Inc.
- Dennis Elliott Kamenitsa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH COMPLIANT COAT
- Publication number 20100142114
- Publication date Jun 10, 2010
- Axcelis Technologies, Inc.
- Ashwin M. Purohit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK
- Publication number 20100142113
- Publication date Jun 10, 2010
- Axcelis Technologies, Inc.
- William D. Lee
- H01 - BASIC ELECTRIC ELEMENTS

Richard J. Rzeszut

Person

Patents Grantslast 30 patents

Hydrogen generator for an ion implanter

Hydrogen generator for an ion implanter

Implantation using solid aluminum iodide (ALI3) for producing atomi...

Implantation using solid aluminum iodide (AlI3) for producing atomi...

De-clamping wafers from an electrostatic chuck

Electrostatic chuck with compliant coat

Bulk gas delivery system for ion implanters

Patents Applicationslast 30 patents

HYDROGEN GENERATOR FOR AN ION IMPLANTER

HYDROGEN GENERATOR FOR AN ION IMPLANTER

IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMI...

IMPLANTATION USING SOLID ALUMINUM IODIDE (ALI3) FOR PRODUCING ATOMI...

ELECTROSTATIC CHUCK WITH COMPLIANT COAT

DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK