Richard Joseph BRULS

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for and method of in-situ particle removal in a lithograp...
- Patent number 11,333,984
- Issue date May 17, 2022
- ASML Netherlands B.V.
- Richard Joseph Bruls
- B08 - CLEANING
Information Patent Grant
Particle suppression systems and methods
- Patent number 11,137,694
- Issue date Oct 5, 2021
- ASML Netherlands B.V.
- Yang-Shan Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mask assembly
- Patent number 11,009,803
- Issue date May 18, 2021
- ASML Netherlands B.V.
- Matthias Kruizinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for obtaining diagnostic information relating...
- Patent number 10,613,445
- Issue date Apr 7, 2020
- ASML Netherlands B.V.
- Marc Hauptmann
- G01 - MEASURING TESTING
Information Patent Grant
Mask assembly
- Patent number 10,558,129
- Issue date Feb 11, 2020
- ASML Netherlands B.V.
- Matthias Kruizinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 10,429,741
- Issue date Oct 1, 2019
- ASML Netherlands B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,345,712
- Issue date Jul 9, 2019
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for obtaining diagnostic information relating...
- Patent number 10,241,418
- Issue date Mar 26, 2019
- ASML Netherlands B.V.
- Marc Hauptmann
- G01 - MEASURING TESTING
Information Patent Grant
Radiation source, lithographic apparatus device manufacturing metho...
- Patent number 10,222,701
- Issue date Mar 5, 2019
- ASML Netherlands B.V.
- Chuangxin Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 10,151,984
- Issue date Dec 11, 2018
- ASML Netherlands B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,952,515
- Issue date Apr 24, 2018
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and method of c...
- Patent number 9,740,113
- Issue date Aug 22, 2017
- ASML Netherlands B.V.
- Paul Janssen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, excimer laser and device manufacturing method
- Patent number 9,316,924
- Issue date Apr 19, 2016
- ASML Netherlands B.V.
- Robertus Cornelis Martinus De Kruif
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source apparatus, lithographic apparatus, method of gener...
- Patent number 9,298,110
- Issue date Mar 29, 2016
- ASML Netherlands B.V.
- Jens Arno Steinhoff
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Side seal for wet lens elements
- Patent number 9,195,148
- Issue date Nov 24, 2015
- ASML Holding N.V.
- Matthew Lipson
- G02 - OPTICS
Information Patent Grant
Immersion lithographic apparatus with a barrier between a projectio...
- Patent number 9,176,371
- Issue date Nov 3, 2015
- ASML Netherlands B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
- Patent number 9,164,403
- Issue date Oct 20, 2015
- ASML Netherlands B.V.
- Antonius Theodorus Wilhelmus Kempen
- B08 - CLEANING
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,134,622
- Issue date Sep 15, 2015
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,134,623
- Issue date Sep 15, 2015
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,780,321
- Issue date Jul 15, 2014
- ASML Netherlands B.V.
- Thijs Egidius Johannes Knaapen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method of operating the apparatus with a...
- Patent number 8,730,447
- Issue date May 20, 2014
- ASML Netherlands B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,634,056
- Issue date Jan 21, 2014
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 8,564,757
- Issue date Oct 22, 2013
- ASML Netherlands B.V.
- Bauke Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,547,519
- Issue date Oct 1, 2013
- ASML Netherlands B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, excimer laser and device manufacturing method
- Patent number 8,089,613
- Issue date Jan 3, 2012
- ASML Netherlands B.V.
- Robertus Cornelis Martinus De Kruif
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and mask havin...
- Patent number 7,843,552
- Issue date Nov 30, 2010
- ASML Netherlands B.V.
- Richard Joseph Bruls
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, excimer laser and device manufacturing method
- Patent number 7,817,247
- Issue date Oct 19, 2010
- ASML Netherlands B.V.
- Robertus Cornelis Martinus De Kruif
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Side seal for wet lens elements
- Patent number 7,781,029
- Issue date Aug 24, 2010
- ASML Holding N.V.
- Matthew Lipson
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus, excimer laser and device manufacturing method
- Patent number 7,595,863
- Issue date Sep 29, 2009
- ASML Netherlands B.V.
- Robertus Cornelis Martinus Kruif
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,534,552
- Issue date May 19, 2009
- ASML Netherlands B.V.
- Robertus Cornelis Martinus De Kruif
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS
- Publication number 20250021022
- Publication date Jan 16, 2025
- Tiannan GUAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...
- Publication number 20230063156
- Publication date Mar 2, 2023
- ASML Holding N.V.
- Ronald Peter ALBRIGHT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PARTICLE SUPPRESSION SYSTEMS AND METHODS
- Publication number 20210173315
- Publication date Jun 10, 2021
- ASML NETHERLANDS B.V.
- Yang-Shan HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus For and Method of In-Situ Particle Removal in a Lithograp...
- Publication number 20210041795
- Publication date Feb 11, 2021
- ASML Netherlands B..V.
- Richard Joseph BRULS
- B08 - CLEANING
Information Patent Application
Mask Assembly
- Publication number 20200057394
- Publication date Feb 20, 2020
- ASML NETHERLANDS B.V.
- Matthias KRUIZINGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190324374
- Publication date Oct 24, 2019
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING T...
- Publication number 20190219929
- Publication date Jul 18, 2019
- ASML NETHERLANDS B.V.
- Marc HAUPTMANN
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20190086814
- Publication date Mar 21, 2019
- ASML NETHERLANDS B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Mask Assembly
- Publication number 20180329314
- Publication date Nov 15, 2018
- Matthias KRUIZINGA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20180203364
- Publication date Jul 19, 2018
- ASMLNETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO...
- Publication number 20170363969
- Publication date Dec 21, 2017
- ASML Netherlands B.V.
- Marc HAUPTMANN
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND METHOD OF C...
- Publication number 20170131643
- Publication date May 11, 2017
- ASML NETHERLANDS B.V.
- Paul JANSSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHO...
- Publication number 20160209753
- Publication date Jul 21, 2016
- ASML NETHERLANDS B.V.
- Chuangxin ZHAO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20160124319
- Publication date May 5, 2016
- ASML NETHERLANDS B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20160004171
- Publication date Jan 7, 2016
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140233004
- Publication date Aug 21, 2014
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140098357
- Publication date Apr 10, 2014
- ASML Netherland B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS,...
- Publication number 20130070218
- Publication date Mar 21, 2013
- ASML Netherland B.V.
- Vladimir Vitalevich Ivanov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Radiation Source, Lithographic Apparatus and Device Manufacturing M...
- Publication number 20120295205
- Publication date Nov 22, 2012
- ASML NETHERLANDS B.V.
- Antonius Theodorus Wilhelmus Kempen
- B08 - CLEANING
Information Patent Application
LITHOGRAPHIC APPARATUS, EXCIMER LASER AND DEVICE MANUFACTURING METHOD
- Publication number 20120057144
- Publication date Mar 8, 2012
- ASML NETHERLANDS B.V.
- Robertus Cornelis Martinus DE KRUIF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110273677
- Publication date Nov 10, 2011
- ASML NETHERLANDS B.V.
- Bob STREEFKERK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110273679
- Publication date Nov 10, 2011
- ASML NETHERLANDS B.V.
- Thijs Egidius Johannes KNAAPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RADIATION SOURCE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF GENER...
- Publication number 20110222040
- Publication date Sep 15, 2011
- ASML NETHERLANDS B.V.
- Jens Arno STEINHOFF
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS, EXCIMER LASER AND DEVICE MANUFACTURING METHOD
- Publication number 20100329290
- Publication date Dec 30, 2010
- ASML NETHERLANDS B.V.
- Robertus Cornelis Martinus DE KRUIF
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20100328634
- Publication date Dec 30, 2010
- ASML NETHERLANDS B.V.
- Bauke Jansen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Side Seal for Wet Lens Elements
- Publication number 20100271605
- Publication date Oct 28, 2010
- ASML Holding N.V.
- Matthew Lipson
- G02 - OPTICS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100157260
- Publication date Jun 24, 2010
- ASML NETHERLANDS B.V.
- Thijs Egidius Johannes KNAAPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD OF GENERATING THE APPARATUS
- Publication number 20100066988
- Publication date Mar 18, 2010
- ASML NETHERLANDS B.V.
- Jeroen Peter Johannes Bruijstens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20100066987
- Publication date Mar 18, 2010
- ASML NETHERLANDS B.V.
- Jeroen Peter Johannes BRUIJSTENS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20090207397
- Publication date Aug 20, 2009
- ASML NETHERLANDS B.V.
- Bob Streefkerk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Richard Joseph BRULS

Person

Patents Grantslast 30 patents

Apparatus for and method of in-situ particle removal in a lithograp...

Particle suppression systems and methods

Mask assembly

Methods and apparatus for obtaining diagnostic information relating...

Mask assembly

Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and device manufacturing method

Method and apparatus for obtaining diagnostic information relating...

Radiation source, lithographic apparatus device manufacturing metho...

Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method and method of c...

Lithographic apparatus, excimer laser and device manufacturing method

Radiation source apparatus, lithographic apparatus, method of gener...

Side seal for wet lens elements

Immersion lithographic apparatus with a barrier between a projectio...

Radiation source, lithographic apparatus and device manufacturing m...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and method of operating the apparatus with a...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and a method of operating the apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus, excimer laser and device manufacturing method

Lithographic apparatus, device manufacturing method, and mask havin...

Lithographic apparatus, excimer laser and device manufacturing method

Side seal for wet lens elements

Lithographic apparatus, excimer laser and device manufacturing method

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...

PARTICLE SUPPRESSION SYSTEMS AND METHODS

Apparatus For and Method of In-Situ Particle Removal in a Lithograp...

Mask Assembly

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

METHODS & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING T...

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

Mask Assembly

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

METHOD & APPARATUS FOR OBTAINING DIAGNOSTIC INFORMATION RELATING TO...

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND METHOD OF C...

RADIATION SOURCE, LITHOGRAPHIC APPARATUS DEVICE MANUFACTURING METHO...

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SYSTEM FOR REMOVING CONTAMINANT PARTICLES, LITHOGRAPHIC APPARATUS,...

Radiation Source, Lithographic Apparatus and Device Manufacturing M...

LITHOGRAPHIC APPARATUS, EXCIMER LASER AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

RADIATION SOURCE APPARATUS, LITHOGRAPHIC APPARATUS, METHOD OF GENER...

LITHOGRAPHIC APPARATUS, EXCIMER LASER AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

Side Seal for Wet Lens Elements

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND METHOD OF GENERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD