Richard M. Blank

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Fixture for automatic calibration of substrate transfer robot
- Patent number 12,168,301
- Issue date Dec 17, 2024
- Lam Research Corporation
- Richard Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Transfer robot for reduced footprint platform architecture
- Patent number 11,908,714
- Issue date Feb 20, 2024
- Lam Research Corporation
- Richard H. Gould
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer handling robot with radial gas curtain and/or interior volume...
- Patent number 11,833,662
- Issue date Dec 5, 2023
- Lam Research Corporation
- Charles N. Ditmore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,742,229
- Issue date Aug 29, 2023
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 11,699,610
- Issue date Jul 11, 2023
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced automatic wafer centering system and techniques for same
- Patent number 11,581,214
- Issue date Feb 14, 2023
- Lam Research Corporation
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduced footprint platform architecture with linear vacuum transfer...
- Patent number 11,521,869
- Issue date Dec 6, 2022
- Lam Research Corporation
- Richard H. Gould
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic sheath control with edge ring lift
- Patent number 11,512,393
- Issue date Nov 29, 2022
- Lam Research Corporation
- Jacob Lee Hiester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 11,482,436
- Issue date Oct 25, 2022
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,239,100
- Issue date Feb 1, 2022
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimized low energy / high productivity deposition system
- Patent number 11,024,531
- Issue date Jun 1, 2021
- Lam Research Corporation
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced automatic wafer centering system and techniques for same
- Patent number 10,796,940
- Issue date Oct 6, 2020
- Lam Research Corporation
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 10,651,065
- Issue date May 12, 2020
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-station tool with wafer transfer microclimate systems
- Patent number 10,515,834
- Issue date Dec 24, 2019
- Lam Research Corporation
- Mohsen Salek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart vibration wafer with optional integration with semiconductor...
- Patent number 10,509,052
- Issue date Dec 17, 2019
- Lam Research Corporation
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum robot positioning system with reduced sensitivity to chamber...
- Patent number 10,483,142
- Issue date Nov 19, 2019
- Lam Research Corporation
- Mark K. Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer handling robots with rotational joint encoders
- Patent number 10,155,309
- Issue date Dec 18, 2018
- Lam Research Corporation
- Richard M. Blank
- G05 - CONTROLLING REGULATING
Information Patent Grant
Rotational indexer with additional rotational axes
- Patent number 10,109,517
- Issue date Oct 23, 2018
- Lam Research Corporation
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot for a substrate processing system
- Patent number 9,576,833
- Issue date Feb 21, 2017
- Lam Research Corporation
- Richard Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer position correction with a dual, side-by-side wafer transfer...
- Patent number 9,496,159
- Issue date Nov 15, 2016
- Novellus Systems, Inc.
- Damon Genetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dedicated hot and cold end effectors for improved throughput
- Patent number 9,472,432
- Issue date Oct 18, 2016
- Novellus Systems, Inc.
- Richard M. Blank
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Touch auto-calibration of process modules
- Patent number 9,349,629
- Issue date May 24, 2016
- Lam Research Corporation
- Richard M. Blank
- G05 - CONTROLLING REGULATING
Information Patent Grant
Robot with integrated aligner
- Patent number 9,299,598
- Issue date Mar 29, 2016
- LAM Research Corp.
- Richard M. Blank
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Systems and methods for inhibiting oxide growth in substrate handle...
- Patent number 9,275,884
- Issue date Mar 1, 2016
- Novellus Systems, Inc.
- Mukul Khosla
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum robot with linear translation carriage
- Patent number 9,245,783
- Issue date Jan 26, 2016
- Novellus Systems, Inc.
- Richard M. Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
End effector having multiple-position contact points
- Patent number 9,214,375
- Issue date Dec 15, 2015
- Lam Research Corporation
- Matthew J. Rodnick
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Dual arm vacuum robot
- Patent number 9,190,306
- Issue date Nov 17, 2015
- Lam Research Corporation
- Richard Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer position correction with a dual, side-by-side wafer transfer...
- Patent number 9,002,514
- Issue date Apr 7, 2015
- Novellus Systems, Inc.
- Damon Genetti
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Mass damper for semiconductor wafer handling end effector
- Patent number 8,985,935
- Issue date Mar 24, 2015
- Novellus Systems, Inc.
- Mark K. Tan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Dual arm vacuum robot with common drive pulley
- Patent number 8,961,099
- Issue date Feb 24, 2015
- Novellus Systems, Inc.
- Richard M. Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
DIRECT-PICK ROBOT FOR MULTI-STATION SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20250046643
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT
- Publication number 20250029860
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD TO PEDESTAL GAPPING WITH DIFFERENTIAL CAPACITIVE SENSOR...
- Publication number 20240353217
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Jacob L. HIESTER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
- Publication number 20240234106
- Publication date Jul 11, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick LEESER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTATIONAL INDEXERS WITH WAFER CENTERING CAPABILITY
- Publication number 20240213070
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Brian Lewis Ratliff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE
- Publication number 20240194505
- Publication date Jun 13, 2024
- Richard H. Gould
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
- Publication number 20240136161
- Publication date Apr 25, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick LEESER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20230395410
- Publication date Dec 7, 2023
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
- Publication number 20230088715
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Jacob Lee Hiester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER HANDLING ROBOT WITH RADIAL GAS CURTAIN AND/OR INTERIOR VOLUME...
- Publication number 20230074285
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Charles N. Ditmore
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE
- Publication number 20230062737
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- Richard H. GOULD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES
- Publication number 20230063281
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HANDLING ROBOT WITH GRAVITATIONAL FIELD SENSOR
- Publication number 20220395986
- Publication date Dec 15, 2022
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED ADAPTIVE POSITIONING SYSTEMS AND ROUTINES FOR AUTOMATED...
- Publication number 20220254666
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Hossein Sadeghi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT
- Publication number 20220134568
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- Richard BLANK
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20220108902
- Publication date Apr 7, 2022
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME
- Publication number 20220028714
- Publication date Jan 27, 2022
- LAM RESEARCH CORPORATION
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE
- Publication number 20210320029
- Publication date Oct 14, 2021
- LAM RESEARCH CORPORATION
- Michael NORDIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED FOOTPRINT WAFER HANDLING PLATFORM
- Publication number 20210272832
- Publication date Sep 2, 2021
- LAM RESEARCH CORPORATION
- Christopher W. Burkhart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES
- Publication number 20210118715
- Publication date Apr 22, 2021
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20200273731
- Publication date Aug 27, 2020
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT
- Publication number 20200173018
- Publication date Jun 4, 2020
- LAM RESEARCH CORPORATION
- Jacob Lee Hiester
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME
- Publication number 20200144097
- Publication date May 7, 2020
- LAM RESEARCH CORPORATION
- Peter S. Thaulad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED FOOTPRINT PLATFORM ARCHITECTURE WITH LINEAR VACUUM TRANSFER...
- Publication number 20200083071
- Publication date Mar 12, 2020
- LAM RESEARCH CORPORATION
- Richard H. GOULD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER
- Publication number 20190172738
- Publication date Jun 6, 2019
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SMART VIBRATION WAFER WITH OPTIONAL INTEGRATION WITH SEMICONDUCTOR...
- Publication number 20180224500
- Publication date Aug 9, 2018
- LAM RESEARCH CORPORATION
- Peter S. Thaulad
- G01 - MEASURING TESTING
Information Patent Application
OPTIMIZED LOW ENERGY / HIGH PRODUCTIVITY DEPOSITION SYSTEM
- Publication number 20180211864
- Publication date Jul 26, 2018
- LAM RESEARCH CORPORATION
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES, INCLUDING H...
- Publication number 20170125272
- Publication date May 4, 2017
- LAM RESEARCH CORPORATION
- James Stephen van Gogh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-HARDNESS-MATERIAL-POWDER INFUSED ELASTOMER FOR HIGH FRICTION A...
- Publication number 20170040205
- Publication date Feb 9, 2017
- LAM RESEARCH CORPORATION
- Jacob L. Hiester
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ROBOT FOR A SUBSTRATE PROCESSING SYSTEM
- Publication number 20160027676
- Publication date Jan 28, 2016
- LAM RESEARCH CORPORATION
- Richard Blank
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Richard M. Blank

Person

Patents Grantslast 30 patents

Fixture for automatic calibration of substrate transfer robot

Transfer robot for reduced footprint platform architecture

Wafer handling robot with radial gas curtain and/or interior volume...

Auto-calibration to a station of a process module that spins a wafer

Rotational indexer with additional rotational axes

Enhanced automatic wafer centering system and techniques for same

Reduced footprint platform architecture with linear vacuum transfer...

Dynamic sheath control with edge ring lift

Rotational indexer with additional rotational axes

Auto-calibration to a station of a process module that spins a wafer

Optimized low energy / high productivity deposition system

Enhanced automatic wafer centering system and techniques for same

Auto-calibration to a station of a process module that spins a wafer

Multi-station tool with wafer transfer microclimate systems

Smart vibration wafer with optional integration with semiconductor...

Vacuum robot positioning system with reduced sensitivity to chamber...

Wafer handling robots with rotational joint encoders

Rotational indexer with additional rotational axes

Robot for a substrate processing system

Wafer position correction with a dual, side-by-side wafer transfer...

Dedicated hot and cold end effectors for improved throughput

Touch auto-calibration of process modules

Robot with integrated aligner

Systems and methods for inhibiting oxide growth in substrate handle...

Vacuum robot with linear translation carriage

End effector having multiple-position contact points

Dual arm vacuum robot

Wafer position correction with a dual, side-by-side wafer transfer...

Mass damper for semiconductor wafer handling end effector

Dual arm vacuum robot with common drive pulley

Patents Applicationslast 30 patents

DIRECT-PICK ROBOT FOR MULTI-STATION SEMICONDUCTOR PROCESSING CHAMBERS

NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT

SHOWERHEAD TO PEDESTAL GAPPING WITH DIFFERENTIAL CAPACITIVE SENSOR...

TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS

ROTATIONAL INDEXERS WITH WAFER CENTERING CAPABILITY

TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE

TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT

WAFER HANDLING ROBOT WITH RADIAL GAS CURTAIN AND/OR INTERIOR VOLUME...

TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE

ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES

WAFER HANDLING ROBOT WITH GRAVITATIONAL FIELD SENSOR

INTEGRATED ADAPTIVE POSITIONING SYSTEMS AND ROUTINES FOR AUTOMATED...

FIXTURE FOR AUTOMATIC CALIBRATION OF SUBSTRATE TRANSFER ROBOT

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME

MECHANICAL INDEXER FOR MULTI-STATION PROCESS MODULE

REDUCED FOOTPRINT WAFER HANDLING PLATFORM

ROTATIONAL INDEXER WITH ADDITIONAL ROTATIONAL AXES

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

DYNAMIC SHEATH CONTROL WITH EDGE RING LIFT

ENHANCED AUTOMATIC WAFER CENTERING SYSTEM AND TECHNIQUES FOR SAME

REDUCED FOOTPRINT PLATFORM ARCHITECTURE WITH LINEAR VACUUM TRANSFER...

AUTO-CALIBRATION TO A STATION OF A PROCESS MODULE THAT SPINS A WAFER

SMART VIBRATION WAFER WITH OPTIONAL INTEGRATION WITH SEMICONDUCTOR...

OPTIMIZED LOW ENERGY / HIGH PRODUCTIVITY DEPOSITION SYSTEM

WAFER TRANSFER MICROCLIMATE TECHNIQUES AND APPARATUSES, INCLUDING H...

HIGH-HARDNESS-MATERIAL-POWDER INFUSED ELASTOMER FOR HIGH FRICTION A...

ROBOT FOR A SUBSTRATE PROCESSING SYSTEM