Richard M. Steger

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Beaverton, OR, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for filling interlayer vias on ferroelectric p...
- Patent number 7,001,782
- Issue date Feb 21, 2006
- Intel Corporation
- Daniel C. Diana
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Chemical-mechanical post-etch removal of photoresist in polymer mem...
- Publication number 20060000493
- Publication date Jan 5, 2006
- Richard M. Steger
- B08 - CLEANING