TREA

Richard M. White

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  • Newmarket, NH, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Biasing system for a plasma processing apparatus
    • Patent number 10,290,475
    • Issue date May 14, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Temperature controlled ion source
    • Patent number 10,262,833
    • Issue date Apr 16, 2019
    • Varian Semiconductor Equipment Associates, Inc.
    • Scott C. Holden
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Temperature controlled ion source
    • Patent number 9,859,098
    • Issue date Jan 2, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Scott C. Holden
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma potential modulated ion implantation system
    • Patent number 9,297,063
    • Issue date Mar 29, 2016
    • Varian Semiconductor Equipment Associates, Inc.
    • Svetlana B. Radovanov
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Technique for processing a substrate
    • Patent number 9,093,372
    • Issue date Jul 28, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Technique for processing a substrate
    • Patent number 9,064,795
    • Issue date Jun 23, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Reducing glitching in an ion implanter
    • Patent number 9,062,377
    • Issue date Jun 23, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • William T. Levay
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Biasing system for a plasma processing apparatus
    • Patent number 8,916,056
    • Issue date Dec 23, 2014
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and system for in-situ monitoring of cathode erosion and pre...
    • Patent number 8,756,021
    • Issue date Jun 17, 2014
    • Varian Semiconductor Equipment Associates, Inc.
    • Russell J. Low
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Deceleration lens
    • Patent number 8,481,960
    • Issue date Jul 9, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • Svetlana Radovanov
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    System and method for ion implantation with dual purpose mask
    • Patent number 8,461,558
    • Issue date Jun 11, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Temperature Controlled Ion Source
    • Publication number 20180090297
    • Publication date Mar 29, 2018
    • Varian Semiconductor Equipment Associates, Inc.
    • Scott C. Holden
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Temperature Controlled Ion Source
    • Publication number 20170178857
    • Publication date Jun 22, 2017
    • Varian Semiconductor Equipment Associates, Inc.
    • Scott C. Holden
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Technique For Processing A Substrate
    • Publication number 20150179455
    • Publication date Jun 25, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LIFETIME ION SOURCE
    • Publication number 20150034837
    • Publication date Feb 5, 2015
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    BIASING SYSTEM FOR A PLASMA PROCESSING APPARATUS
    • Publication number 20150007941
    • Publication date Jan 8, 2015
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Reducing Glitching In An Ion Implanter
    • Publication number 20140127394
    • Publication date May 8, 2014
    • George M. Gammel
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    BIASING SYSTEM FOR A PLASMA PROCESSING APPARATUS
    • Publication number 20140106571
    • Publication date Apr 17, 2014
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Reducing Glitching In An Ion Implanter
    • Publication number 20140099430
    • Publication date Apr 10, 2014
    • William T. Levay
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Plasma Potential Modulated ION Implantation System
    • Publication number 20130287964
    • Publication date Oct 31, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • Svetlana B. Radovanov
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TECHNIQUE FOR PROCESSING A SUBSTRATE
    • Publication number 20130260544
    • Publication date Oct 3, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TECHNIQUE FOR PROCESSING A SUBSTRATE
    • Publication number 20130260543
    • Publication date Oct 3, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM AND METHOD FOR ION IMPLANTATION WITH DUAL PURPOSE MASK
    • Publication number 20130001440
    • Publication date Jan 3, 2013
    • Varian Semiconductor Equipment Associates, Inc.
    • Bon-Woong Koo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHOD AND SYSTEM FOR IN-SITU MONITORING OF CATHODE ERSOSION AND PR...
    • Publication number 20120101742
    • Publication date Apr 26, 2012
    • Varian Semiconductor Equipment Associates, Inc.
    • Russell J. Low
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DECELERATION LENS
    • Publication number 20120001087
    • Publication date Jan 5, 2012
    • Varian Semiconductor Equipment Associates, Inc.
    • Svetlana Radovanov
    • H01 - BASIC ELECTRIC ELEMENTS