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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
11,378,893
Issue date
Jul 5, 2022
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,838,310
Issue date
Nov 17, 2020
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
10,649,341
Issue date
May 12, 2020
ASML Netherlands B.V.
Clemens Johannes Gerardus Van den Dungen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
10,254,663
Issue date
Apr 9, 2019
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,465,302
Issue date
Oct 11, 2016
ASML Netherlands B.V.
Clemens Johannes Gerardus Van den Dungen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,268,242
Issue date
Feb 23, 2016
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,188,880
Issue date
Nov 17, 2015
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus
Patent number
9,036,127
Issue date
May 19, 2015
ASML Netherlands B.V.
Clemens Johannes Gerardus Van den Dungen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
Patent number
8,711,326
Issue date
Apr 29, 2014
ASML Netherlands B.V.
Ronald Van Der Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,427,629
Issue date
Apr 23, 2013
ASML Netherlands B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, a method of controlling the apparatus and a...
Patent number
8,405,817
Issue date
Mar 26, 2013
ASML Netherlands B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,330,936
Issue date
Dec 11, 2012
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Immersion lithography
Patent number
8,129,097
Issue date
Mar 6, 2012
ASML Netherlands B.V.
Dirk De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,808,614
Issue date
Oct 5, 2010
ASML Netherlands B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method having liqui...
Patent number
7,804,575
Issue date
Sep 28, 2010
ASML Netherlands B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,522,261
Issue date
Apr 21, 2009
ASML Netherlands B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20210063898
Publication date
Mar 4, 2021
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20190235397
Publication date
Aug 1, 2019
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20170023870
Publication date
Jan 26, 2017
ASML NETHERLANDS B.V.
Clemens Johannes Gerardus VAN DEN DUNGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
Publication number
20160048085
Publication date
Feb 18, 2016
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20150234294
Publication date
Aug 20, 2015
ASML NETHERLANDS B.V.
Clemens Johannes Gerardus VAN DEN DUNGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20120113402
Publication date
May 10, 2012
ASML NETHERLANDS B.V.
Theodorus Petrus Maria CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MAN...
Publication number
20110292357
Publication date
Dec 1, 2011
ASML NETHERLANDS B.V.
Ronald Van Der Ham
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100321651
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
Carlo Cornelis Maria LUIJTEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20100321650
Publication date
Dec 23, 2010
ASML NETHERLANDS B.V.
THEODORUS PETRUS MARIA CADEE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, A METHOD OF CONTROLLING THE APPARATUS AND A...
Publication number
20100214543
Publication date
Aug 26, 2010
ASML NETHERLANDS B.V.
Marco Koert Stavenga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS
Publication number
20090262318
Publication date
Oct 22, 2009
ASML NETHERLANDS B.V.
Clemens Johannes Gerardus VAN DEN DUNGEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Immersion lithography
Publication number
20090170041
Publication date
Jul 2, 2009
ASML NETHERLANDS B.V.
Dirk De Vries
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090153823
Publication date
Jun 18, 2009
ASML NETHERLANDS B.V.
Carlo Cornelis Maria LUIJTEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20080068570
Publication date
Mar 20, 2008
ASML NETHERLANDS B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060066826
Publication date
Mar 30, 2006
ASML NETHERLANDS B.V.
Carlo Cornelis Maria Luijten
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060033898
Publication date
Feb 16, 2006
ASML NETHERLANDS B.V.
Theodorus Petrus Maria Cadee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY