Richard N. Savage

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Scotts Valley, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Plasma deposition of spin chucks to reduce contamination of Silicon...
- Patent number 6,955,720
- Issue date Oct 18, 2005
- ASML Holding N.V.
- Emir Gurer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer processing system with vertically-stacked proce...
- Patent number 6,846,149
- Issue date Jan 25, 2005
- Aviza Technology, Inc.
- Richard N. Savage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer processing system with vertically-stacked proce...
- Patent number 6,610,150
- Issue date Aug 26, 2003
- ASML US, Inc.
- Richard N. Savage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma deposition of spin chucks to reduce contamination of silicon...
- Patent number 6,242,364
- Issue date Jun 5, 2001
- Silicon Valley Group, Inc.
- Emir Gurer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Semiconductor wafer processing system with vertically-stacked proce...
- Publication number 20020033136
- Publication date Mar 21, 2002
- Silicon Valley Group, Thermal Systems LLC.
- Richard N. Savage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma deposition of spin chucks to reduce contamination of silicon...
- Publication number 20010044217
- Publication date Nov 22, 2001
- Emir Gurer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor wafer processing system with vertically-stacked proce...
- Publication number 20010010950
- Publication date Aug 2, 2001
- Silicon Valley Group Thermal Systems LLC
- Richard N. Savage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...