Richard N. Savage

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Livermore, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for adaptive process control of critical dimen...
- Patent number 6,177,133
- Issue date Jan 23, 2001
- Silicon Valley Group, Inc.
- Emir Gurer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoresist coating process control with solvent vapor sensor
- Patent number 6,027,760
- Issue date Feb 22, 2000
- Emir Gurer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for automatically identifying chemical species...
- Patent number 5,014,217
- Issue date May 7, 1991
- S C Technology, Inc.
- Richard N. Savage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical switch
- Patent number 4,938,555
- Issue date Jul 3, 1990
- SC Technology, Int.
- Richard N. Savage
- G02 - OPTICS