Richard O. COLLINS

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Multi-layer EPI chamber body
- Patent number 12,188,148
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Shu-Kwan Lau
- C30 - CRYSTAL GROWTH
Information Patent Grant
Multi-thermal CVD chambers with shared gas delivery and exhaust system
- Patent number 12,037,701
- Issue date Jul 16, 2024
- Applied Materials, Inc.
- Zhiyuan Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Overlap susceptor and preheat ring
- Patent number 11,781,212
- Issue date Oct 10, 2023
- Applied Material, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,784,076
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,424,149
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Diode laser for wafer heating for EPI processes
- Patent number 11,171,023
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Schubert S. Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor support
- Patent number 10,837,121
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Richard O. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 10,755,955
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor design to reduce edge thermal peak
- Patent number 10,269,614
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Schubert S. Chu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heating lamp assembly
- Patent number 9,613,835
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Richard O. Collins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower chamber liner
- Patent number D716240
- Issue date Oct 28, 2014
- Applied Materials, Inc.
- Shu-Kwan Lau
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Upper chamber liner
- Patent number D711331
- Issue date Aug 19, 2014
- Applied Materials, Inc.
- Shu-Kwan Lau
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
System and method for pedestal adjustment
- Patent number 8,747,560
- Issue date Jun 10, 2014
- Applied Materials, Inc.
- Richard Collins
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for the deposition of high dielectric constant films
- Patent number 8,496,780
- Issue date Jul 30, 2013
- Applied Materials, Inc.
- Bobby M. Ronsse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Non-contact substrate support position sensing system and correspon...
- Patent number 8,441,640
- Issue date May 14, 2013
- Applied Materials, Inc.
- Kailash Kiran Patalay
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
System and method for pedestal adjustment
- Patent number 8,398,777
- Issue date Mar 19, 2013
- Applied Materials, Inc.
- Richard O. Collins
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20240318351
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Zhiyuan YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THICKNESS UNIFORMITY IMPROVEMENT KIT FOR THERMALLY SENSITIVE EPITAX...
- Publication number 20240038575
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OVERLAP SUSCEPTOR AND PREHEAT RING
- Publication number 20240026522
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL
- Publication number 20230402268
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Songjae LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20220351999
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERLAP SUSCEPTOR AND PREHEAT RING
- Publication number 20220325400
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EPITAXIAL DEPOSITION CHAMBER
- Publication number 20220322492
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Shu-Kwan LAU
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
MULTI-LAYER EPI CHAMBER BODY
- Publication number 20220195617
- Publication date Jun 23, 2022
- Applied Materials, Inc.
- Shu-Kwan LAU
- C30 - CRYSTAL GROWTH
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20210324514
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Zhiyuan YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20200303228
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20190252229
- Publication date Aug 15, 2019
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR SUPPORT
- Publication number 20170275777
- Publication date Sep 28, 2017
- Applied Materials, Inc.
- Richard O. COLLINS
- C30 - CRYSTAL GROWTH
Information Patent Application
FLAT SUSCEPTOR WITH GROOVES FOR MINIMIZING TEMPERATURE PROFILE ACRO...
- Publication number 20170175265
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- Kartik SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES
- Publication number 20170103907
- Publication date Apr 13, 2017
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK
- Publication number 20160133504
- Publication date May 12, 2016
- Applied Materials, Inc.
- Schubert S. CHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR SELF-CENTERING PRE-HEAT RING
- Publication number 20150162230
- Publication date Jun 11, 2015
- Applied Materials, Inc.
- Kevin Joseph BAUTISTA
- C30 - CRYSTAL GROWTH
Information Patent Application
SUSCEPTOR SUPPORT SHAFT AND KINEMATIC MOUNT
- Publication number 20150037019
- Publication date Feb 5, 2015
- Applied Materials, Inc.
- Richard O. COLLINS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
HEATING LAMP ASSEMBLY
- Publication number 20140270732
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- RICHARD O. COLLINS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR THE DEPOSITION OF HIGH DIELECTRIC CONSTANT FILMS
- Publication number 20130333621
- Publication date Dec 19, 2013
- Bobby M. Ronsse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR PRECURSOR DELIVERY
- Publication number 20130220221
- Publication date Aug 29, 2013
- Applied Materials, Inc.
- ERROL ANTONIO C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PEDESTAL ADJUSTMENT
- Publication number 20130152859
- Publication date Jun 20, 2013
- Applied Materials, Inc.
- Richard O. Collins
- C30 - CRYSTAL GROWTH
Information Patent Application
METHODS AND APPARATUS FOR DEPOSITION PROCESSES
- Publication number 20130025538
- Publication date Jan 31, 2013
- Applied Materials, Inc.
- RICHARD O. COLLINS
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE
- Publication number 20120270384
- Publication date Oct 25, 2012
- Applied Materials, Inc.
- ERROL ANTONIO C. SANCHEZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR WITH MULTIPLE PROCESSING LEVELS AND DUAL-AXIS MOTORIZED...
- Publication number 20100075488
- Publication date Mar 25, 2010
- Applied Materials, Inc.
- Richard O. Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR PEDESTAL ADJUSTMENT
- Publication number 20090272719
- Publication date Nov 5, 2009
- Applied Materials, Inc.
- Richard O. Collins
- C30 - CRYSTAL GROWTH
Information Patent Application
NON-CONTACT SUBSTRATE SUPPORT POSITION SENSING SYSTEM AND CORRESPON...
- Publication number 20090276097
- Publication date Nov 5, 2009
- Applied Materials, Inc.
- Kailash Kiran Patalay
- C30 - CRYSTAL GROWTH
Information Patent Application
MODULAR CVD EPI 300MM REACTOR
- Publication number 20080072820
- Publication date Mar 27, 2008
- APPLIED MATERIALS, INC.
- Brian H. Burrows
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for the deposition of high dielectric constant films
- Publication number 20060196421
- Publication date Sep 7, 2006
- Bobby M. Ronsse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus for the deposition of high dielectric constant films
- Publication number 20030101938
- Publication date Jun 5, 2003
- APPLIED MATERIALS, INC.
- Bobby M. Ronsse
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Richard O. COLLINS

Person

Patents Grantslast 30 patents

Multi-layer EPI chamber body

Multi-thermal CVD chambers with shared gas delivery and exhaust system

Overlap susceptor and preheat ring

Substrate transfer mechanism to reduce back-side substrate contact

Substrate transfer mechanism to reduce back-side substrate contact

Diode laser for wafer heating for EPI processes

Susceptor support

Substrate transfer mechanism to reduce back-side substrate contact

Susceptor design to reduce edge thermal peak

Heating lamp assembly

Lower chamber liner

Upper chamber liner

System and method for pedestal adjustment

Apparatus for the deposition of high dielectric constant films

Non-contact substrate support position sensing system and correspon...

System and method for pedestal adjustment

Patents Applicationslast 30 patents

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

THICKNESS UNIFORMITY IMPROVEMENT KIT FOR THERMALLY SENSITIVE EPITAX...

OVERLAP SUSCEPTOR AND PREHEAT RING

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

PLASMA PRECLEAN SYSTEM FOR CLUSTER TOOL

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

OVERLAP SUSCEPTOR AND PREHEAT RING

EPITAXIAL DEPOSITION CHAMBER

MULTI-LAYER EPI CHAMBER BODY

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

SUSCEPTOR SUPPORT

FLAT SUSCEPTOR WITH GROOVES FOR MINIMIZING TEMPERATURE PROFILE ACRO...

DIODE LASER FOR WAFER HEATING FOR EPI PROCESSES

SUSCEPTOR DESIGN TO REDUCE EDGE THERMAL PEAK

APPARATUS FOR SELF-CENTERING PRE-HEAT RING

SUSCEPTOR SUPPORT SHAFT AND KINEMATIC MOUNT

HEATING LAMP ASSEMBLY

APPARATUS FOR THE DEPOSITION OF HIGH DIELECTRIC CONSTANT FILMS

METHOD AND APPARATUS FOR PRECURSOR DELIVERY

SYSTEM AND METHOD FOR PEDESTAL ADJUSTMENT

METHODS AND APPARATUS FOR DEPOSITION PROCESSES

APPARATUS FOR DEPOSITION OF MATERIALS ON A SUBSTRATE

CVD REACTOR WITH MULTIPLE PROCESSING LEVELS AND DUAL-AXIS MOTORIZED...

SYSTEM AND METHOD FOR PEDESTAL ADJUSTMENT

NON-CONTACT SUBSTRATE SUPPORT POSITION SENSING SYSTEM AND CORRESPON...

MODULAR CVD EPI 300MM REACTOR

Apparatus for the deposition of high dielectric constant films

Apparatus for the deposition of high dielectric constant films