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Richard P. JANEK
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Oakland, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Atomic layer etching using a combination of plasma and vapor treatm...
Patent number
10,784,118
Issue date
Sep 22, 2020
Lam Research Corporation
Andreas Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Control of directionality in atomic layer etching
Patent number
10,559,475
Issue date
Feb 11, 2020
Lam Research Corporation
Andreas Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Atomic layer etching of AL2O3 using a combination of plasma and vap...
Patent number
10,256,108
Issue date
Apr 9, 2019
Lam Research Corporation
Andreas Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Control of directionality in atomic layer etching
Patent number
10,229,837
Issue date
Mar 12, 2019
Lam Research Corporation
Andreas Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to etch non-volatile metal materials
Patent number
9,391,267
Issue date
Jul 12, 2016
Lam Research Corporation
Meihua Shen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to etch non-volatile metal materials
Patent number
9,257,638
Issue date
Feb 9, 2016
Lam Research Corporation
Samantha S.H. Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to etch non-volatile metal materials
Patent number
9,130,158
Issue date
Sep 8, 2015
Lam Research Corporation
Meihua Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electroless copper deposition
Patent number
8,524,329
Issue date
Sep 3, 2013
Lam Research Corporation
Yezdi N. Dordi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ATOMIC LAYER ETCHING USING A COMBINATION OF PLASMA AND VAPOR TREATM...
Publication number
20190198345
Publication date
Jun 27, 2019
LAM RESEARCH CORPORATION
Andreas Fischer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CONTROL OF DIRECTIONALITY IN ATOMIC LAYER ETCHING
Publication number
20190157105
Publication date
May 23, 2019
LAM RESEARCH CORPORATION
Andreas Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF DIRECTIONALITY IN ATOMIC LAYER ETCHING
Publication number
20180366343
Publication date
Dec 20, 2018
LAM RESEARCH CORPORATION
Andreas Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL OF DIRECTIONALITY IN ATOMIC LAYER ETCHING
Publication number
20180247832
Publication date
Aug 30, 2018
LAM RESEARCH CORPORATION
Andreas Fischer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ATOMIC LAYER ETCHING OF AL203 USING A COMBINATION OF PLASMA AND VAP...
Publication number
20170256416
Publication date
Sep 7, 2017
LAM RESEARCH CORPORATION
Andreas Fischer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD TO ETCH NON-VOLATILE METAL MATERIALS
Publication number
20150340603
Publication date
Nov 26, 2015
LAM RESEARCH CORPORATION
Meihua SHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO ETCH NON-VOLATILE METAL MATERIALS
Publication number
20150280114
Publication date
Oct 1, 2015
LAM RESEARCH CORPORATION
Meihua SHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO ETCH NON-VOLATILE METAL MATERIALS
Publication number
20150280113
Publication date
Oct 1, 2015
LAM RESEARCH CORPORATION
Samantha S.H. TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTROLESS COPPER DEPOSITION
Publication number
20130149461
Publication date
Jun 13, 2013
LAM RESEARCH CORPORATION
Yezdi N. DORDI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...