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Richard QUINTANILHA
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Optical detector
Patent number
10,976,265
Issue date
Apr 13, 2021
ASML Netherlands B.V.
Sander Bas Roobol
G01 - MEASURING TESTING
Information
Patent Grant
Determining edge roughness parameters
Patent number
10,634,490
Issue date
Apr 28, 2020
ASML Netherlands B.V.
Martin Jacobus Johan Jak
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology methods, radiation source, metrology apparatus and device...
Patent number
10,555,407
Issue date
Feb 4, 2020
ASML Netherlands B.V.
Alexey Olegovich Polyakov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Metrology methods, radiation source, metrology apparatus and device...
Patent number
10,342,108
Issue date
Jul 2, 2019
ASML Netherlands B.V.
Alexey Olegovich Polyakov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology methods, metrology apparatus and device manufacturing method
Patent number
10,254,644
Issue date
Apr 9, 2019
ASML Netherlands B.V.
Richard Quintanilha
G01 - MEASURING TESTING
Information
Patent Grant
Metrology method, metrology apparatus and device manufacturing method
Patent number
10,222,709
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Richard Quintanilha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Methods and apparatus for simulating interaction of radiation with...
Patent number
10,146,140
Issue date
Dec 4, 2018
ASML Netherlands B.V.
Maxim Pisarenco
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Metrology methods, metrology apparatus and device manufacturing method
Patent number
10,101,671
Issue date
Oct 16, 2018
ASML Netherlands B.V.
Richard Quintanilha
G01 - MEASURING TESTING
Information
Patent Grant
Metrology methods, metrology apparatus and device manufacturing method
Patent number
10,067,074
Issue date
Sep 4, 2018
ASML Netherlands B.V.
Richard Quintanilha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection apparatus and methods, lithographic system and device ma...
Patent number
10,036,962
Issue date
Jul 31, 2018
ASML Netherlands B.V.
Richard Quintanilha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate and patterning device for use in metrology, metrology met...
Patent number
9,915,879
Issue date
Mar 13, 2018
ASML Netherlands B.V.
Richard Quintanilha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection apparatus and method, lithographic apparatus, lithograph...
Patent number
9,904,181
Issue date
Feb 27, 2018
ASML Netherlands B.V.
Richard Quintanilha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Inspection apparatus, inspection method and manufacturing method
Patent number
9,823,586
Issue date
Nov 21, 2017
ASML Netherlands B.V.
Richard Quintanilha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination source for use in inspection methods and/or lithograph...
Patent number
9,632,424
Issue date
Apr 25, 2017
ASML Netherlands B.V.
Richard Quintanilha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, substrate and device manufacturing method
Patent number
9,563,131
Issue date
Feb 7, 2017
ASML Netherlands B.V.
Richard Quintanilha
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, substrate and device manufacturing method
Patent number
9,261,772
Issue date
Feb 16, 2016
ASML Netherlands B.V.
Richard Quintanilha
G01 - MEASURING TESTING
Information
Patent Grant
Illumination source for use in inspection methods and/or lithograph...
Patent number
8,876,346
Issue date
Nov 4, 2014
ASML Netherlands B.V.
Richard Quintanilha
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Metrology Methods, Radiation Source, Metrology Apparatus and Device...
Publication number
20190246480
Publication date
Aug 8, 2019
ASML NETHERLANDS B.V.
Alexey Olegovich POLYAKOV
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Optical Detector
Publication number
20190049393
Publication date
Feb 14, 2019
ASML NETHERLANDS B.V.
Sander Bas ROOBOL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Determining Edge Roughness Parameters
Publication number
20180364036
Publication date
Dec 20, 2018
ASML NETHERLANDS B.V.
Martin Jacobus Johan JAK
G01 - MEASURING TESTING
Information
Patent Application
Metrology Methods, Radiation Source, Metrology Apparatus and Device...
Publication number
20180220518
Publication date
Aug 2, 2018
ASML NETHERLANDS B.V.
Alexey Olegovich POLYAKOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Metrology Methods, Metrology Apparatus and Device Manufacturing Method
Publication number
20170357155
Publication date
Dec 14, 2017
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING
Information
Patent Application
Metrology Methods, Metrology Apparatus and Device Manufacturing Method
Publication number
20170184981
Publication date
Jun 29, 2017
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING
Information
Patent Application
Methods and Apparatus for Simulating Interaction of Radiation with...
Publication number
20170102623
Publication date
Apr 13, 2017
ASML NETHERLANDS B.V.
Maxim PISARENCO
G01 - MEASURING TESTING
Information
Patent Application
Inspection Apparatus, Inspection Method and Manufacturing Method
Publication number
20170045823
Publication date
Feb 16, 2017
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING
Information
Patent Application
Inspection Apparatus and Method, Lithographic Apparatus, Lithograph...
Publication number
20160377990
Publication date
Dec 29, 2016
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING
Information
Patent Application
Inspection Apparatus and Methods, Lithographic System and Device Ma...
Publication number
20160320711
Publication date
Nov 3, 2016
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING
Information
Patent Application
Metrology Methods, Metrology Apparatus and Device Manufacturing Method
Publication number
20160282282
Publication date
Sep 29, 2016
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD, METROLOGY APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160223476
Publication date
Aug 4, 2016
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS, SUBSTRATE AND DEVICE MANUFACTURING METHOD
Publication number
20160062247
Publication date
Mar 3, 2016
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate and Patterning Device for Use in Metrology, Metrology Met...
Publication number
20150331336
Publication date
Nov 19, 2015
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Illumination Source for use in Inspection Methods and/or Lithograph...
Publication number
20150042999
Publication date
Feb 12, 2015
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G02 - OPTICS
Information
Patent Application
Lithographic Apparatus, Substrate and Device Manufacturing Method
Publication number
20130271740
Publication date
Oct 17, 2013
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G01 - MEASURING TESTING
Information
Patent Application
Illumination Source for use in Inspection Methods and/or Lithograph...
Publication number
20130141730
Publication date
Jun 6, 2013
ASML NETHERLANDS B.V.
Richard QUINTANILHA
G02 - OPTICS