Richard SPENGLER

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LUND, SE

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for ensuring planarity of a semiconductor wafer d...
- Patent number 12,180,592
- Issue date Dec 31, 2024
- EPILUVAC AB
- Roger Nilsson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEVICE AND METHOD TO PROVIDE PLANARITY OF A WAFER DURING GROWTH
- Publication number 20220136109
- Publication date May 5, 2022
- EPILUVAC AB
- Roger NILSSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR WITH A MULTI-ZONE HEATED PROCESS CHAMBER
- Publication number 20180002809
- Publication date Jan 4, 2018
- Epiluvac AB
- Richard SPENGLER
- C30 - CRYSTAL GROWTH