Richard Versluis

Follow

Person

Delft, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for thermally conditioning an optical element
- Patent number 9,176,398
- Issue date Nov 3, 2015
- ASML Netherlands B.V.
- Roger Wilhelmus Antonius Henricus Schmitz
- G02 - OPTICS
Information Patent Grant
Optical arrangement, in particular projection exposure apparatus fo...
- Patent number 8,585,224
- Issue date Nov 19, 2013
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical arrangement, in particular projection exposure apparatus fo...
- Patent number 8,382,301
- Issue date Feb 26, 2013
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Gas analyzing system, lithographic apparatus and method of improvin...
- Patent number 7,963,144
- Issue date Jun 21, 2011
- ASML Netherlands B.V.
- Norbertus Benedictus Koster
- G01 - MEASURING TESTING
Information Patent Grant
Gas analyzing system, lithographic apparatus and method of improvin...
- Patent number 7,624,617
- Issue date Dec 1, 2009
- ASML Netherlands B.V.
- Norbertus Benedictus Koster
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FO...
- Publication number 20130148200
- Publication date Jun 13, 2013
- ASML NETHERLANDS B.V.
- Dirk Heinrich Ehm
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR THERMALLY CONDITIONING AN OPTICAL ELEMENT
- Publication number 20110310368
- Publication date Dec 22, 2011
- ASML Netherlands B.V.
- Roger Wilhelmus Antonius Henricus Schmitz
- G02 - OPTICS
Information Patent Application
Gas Analyzing System, Lithographic Apparatus and Method of Improvin...
- Publication number 20100005854
- Publication date Jan 14, 2010
- ASML NETHERLANDS B.V.
- Norbertus Benedictus Koster
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FO...
- Publication number 20090231707
- Publication date Sep 17, 2009
- Carl Zeiss SMT AG
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY
Information Patent Application
Gas analyzing system, lithographic apparatus and method of improvin...
- Publication number 20080128636
- Publication date Jun 5, 2008
- ASML NETHERLANDS B.V.
- Norbertus Benedictus Koster
- G01 - MEASURING TESTING