Richard Wallingford

Person

Forsyth, MO, US

People

Patents Grantslast 30 patents

Information Patent Grant
Deep learning based defect detection
- Patent number 11,776,108
- Issue date Oct 3, 2023
- KLA Corp.
- Richard Wallingford
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Automated focusing system for tracking specimen surface with a conf...
- Patent number 11,592,653
- Issue date Feb 28, 2023
- KLA Corporation
- Xiumei Liu
- G02 - OPTICS
Information Patent Grant
System and method for inspection using tensor decomposition and sin...
- Patent number 11,431,976
- Issue date Aug 30, 2022
- KLA Corporation
- Nurmohammed Patwary
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Determining focus settings for specimen scans
- Patent number 11,330,164
- Issue date May 10, 2022
- KLA Corp.
- Bryant Mantiply
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for mixed mode wafer inspection
- Patent number 11,295,438
- Issue date Apr 5, 2022
- KLA Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical-mode selection for multi-mode semiconductor inspection
- Patent number 11,010,885
- Issue date May 18, 2021
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Active learning for defect classifier training
- Patent number 10,713,769
- Issue date Jul 14, 2020
- KLA-Tencor Corp.
- Jing Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 10,605,744
- Issue date Mar 31, 2020
- KLA-Tencor Corp.
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for defect detection using image reconstruction
- Patent number 10,416,087
- Issue date Sep 17, 2019
- KLA-Tencor Corporation
- Jing Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Data augmentation for convolutional neural network-based defect ins...
- Patent number 10,402,688
- Issue date Sep 3, 2019
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for mixed mode wafer inspection
- Patent number 10,192,303
- Issue date Jan 29, 2019
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and methods for finding a best aperture and mode to enhan...
- Patent number 10,132,760
- Issue date Nov 20, 2018
- KLA-Tencor Corporation
- Pavel Kolchin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 9,880,107
- Issue date Jan 30, 2018
- KLA-Tencor Corp.
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for finding a best aperture and mode to enhan...
- Patent number 9,726,617
- Issue date Aug 8, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
Detecting defects on a wafer
- Patent number 8,775,101
- Issue date Jul 8, 2014
- KLA-Tencor Corp.
- Junqing Huang
- G01 - MEASURING TESTING
Information Patent Grant
Status polling
- Patent number 8,645,100
- Issue date Feb 4, 2014
- KLA-Tencor Corporation
- Krishnamurthy Bhaskar
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor device property extraction, generation, visualization...
- Patent number 8,611,639
- Issue date Dec 17, 2013
- KLA-Tencor Technologies Corp.
- Ashok Kulkarni
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 8,467,047
- Issue date Jun 18, 2013
- KLA-Tencor Corp.
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for detecting defects on a wafer
- Patent number 8,223,327
- Issue date Jul 17, 2012
- KLA-Tencor Corp.
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Grant
Methods for generating a standard reference die for use in a die to...
- Patent number 8,204,296
- Issue date Jun 19, 2012
- KLA-Tencor Corp.
- Kris Bhaskar
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods, carrier media, and systems for select...
- Patent number 8,049,877
- Issue date Nov 1, 2011
- KLA-Tencor Corp.
- Richard Wallingford
- G01 - MEASURING TESTING
Information Patent Grant
Computer-implemented methods, carrier media, and systems for determ...
- Patent number 8,000,905
- Issue date Aug 16, 2011
- KLA-Tencor Technologies Corp.
- Stephanie Chen
- G01 - MEASURING TESTING
Information Patent Grant
Methods for identifying array areas in dies formed on a wafer and m...
- Patent number 7,925,072
- Issue date Apr 12, 2011
- KLA-Tencor Technologies Corp.
- Chien-Huei (Adam) Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Memory load balancing
- Patent number 7,865,037
- Issue date Jan 4, 2011
- KLA-Tencor Corporation
- Krishnamurthy Bhaskar
- G01 - MEASURING TESTING
Information Patent Grant
Methods for generating a standard reference die for use in a die to...
- Patent number 7,796,804
- Issue date Sep 14, 2010
- KLA-Tencor Corp.
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mirror node process verification
- Patent number 7,602,958
- Issue date Oct 13, 2009
- KLA-Tencor Corporation
- Krishnamurthy Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Daisy chained topology
- Patent number 7,555,409
- Issue date Jun 30, 2009
- KLA-Tencor Corporation
- Krishnamurthy Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Programmable image computer
- Patent number 7,379,838
- Issue date May 27, 2008
- KLA-Tencor Corporation
- Krishnamurthy Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Full swath analysis
- Patent number 7,251,586
- Issue date Jul 31, 2007
- KLA-Tencor Technologies Corporation
- Krishnamurthy Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Status polling
- Patent number 7,181,368
- Issue date Feb 20, 2007
- KLA-Tencor Technologies Corporation
- Krishnamurthy Bhaskar
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
DEEP LEARNING MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS
- Publication number 20240095935
- Publication date Mar 21, 2024
- KLA Corporation
- Hong Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Automated Focusing System For Tracking Specimen Surface with a Conf...
- Publication number 20230204934
- Publication date Jun 29, 2023
- KLA Corporation
- Xiumei Liu
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR OPTICAL WAFER CHARACTERIZATION WITH IMAGE UP...
- Publication number 20220383470
- Publication date Dec 1, 2022
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEEP GENERATIVE MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS
- Publication number 20220375051
- Publication date Nov 24, 2022
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMANTIC IMAGE SEGMENTATION FOR SEMICONDUCTOR-BASED APPLICATIONS
- Publication number 20220318986
- Publication date Oct 6, 2022
- KLA Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION
- Publication number 20220230293
- Publication date Jul 21, 2022
- KLA Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEEP LEARNING BASED DEFECT DETECTION
- Publication number 20220044391
- Publication date Feb 10, 2022
- KLA Corporation
- Richard Wallingford
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINING FOCUS SETTINGS FOR SPECIMEN SCANS
- Publication number 20210297600
- Publication date Sep 23, 2021
- KLA Corporation
- Bryant Mantiply
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Automated Focusing System For Tracking Specimen Surface with a Conf...
- Publication number 20200319443
- Publication date Oct 8, 2020
- KLA Corporation
- Xiumei Liu
- G02 - OPTICS
Information Patent Application
System and Method for Inspection Using Tensor Decomposition and Sin...
- Publication number 20200244963
- Publication date Jul 30, 2020
- KLA Corporation
- Nurmohammed Patwary
- G01 - MEASURING TESTING
Information Patent Application
Optical-Mode Selection for Multi-Mode Semiconductor Inspection
- Publication number 20200193588
- Publication date Jun 18, 2020
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ACTIVE LEARNING FOR DEFECT CLASSIFIER TRAINING
- Publication number 20190370955
- Publication date Dec 5, 2019
- KLA-Tencor Corporation
- Jing Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and System for Mixed Mode Wafer Inspection
- Publication number 20190108630
- Publication date Apr 11, 2019
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER
- Publication number 20180202943
- Publication date Jul 19, 2018
- KLA-Tencor Corporation
- Lu Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Data Augmentation for Convolutional Neural Network-Based Defect Ins...
- Publication number 20180157933
- Publication date Jun 7, 2018
- KLA-Tencor Corporation
- Bjorn Brauer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...
- Publication number 20170307545
- Publication date Oct 26, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Defect Detection Using Image Reconstruction
- Publication number 20170191945
- Publication date Jul 6, 2017
- KLA-Tencor Corporation
- Jing Zhang
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...
- Publication number 20140354983
- Publication date Dec 4, 2014
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Mixed Mode Wafer Inspection
- Publication number 20140153814
- Publication date Jun 5, 2014
- KLA-Tencor Corporation
- Jason Z. Lin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Systems and Methods for Detecting Defects on a Wafer
- Publication number 20130250287
- Publication date Sep 26, 2013
- KLA-Tencor Corporation
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Application
DETECTING DEFECTS ON A WAFER
- Publication number 20130035876
- Publication date Feb 7, 2013
- KLA-Tencor Corporation
- Junqing Huang
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Detecting Defects on a Wafer
- Publication number 20120268735
- Publication date Oct 25, 2012
- KLA-Tencor Corporation
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Application
METHODS FOR GENERATING A STANDARD REFERENCE DIE FOR USE IN A DIE TO...
- Publication number 20100329540
- Publication date Dec 30, 2010
- KLA-Tencor Corporation
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER
- Publication number 20100188657
- Publication date Jul 29, 2010
- KLA-Tencor Corporation
- Lu Chen
- G01 - MEASURING TESTING
Information Patent Application
COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR SELECT...
- Publication number 20090284733
- Publication date Nov 19, 2009
- Richard Wallingford
- G01 - MEASURING TESTING
Information Patent Application
METHODS FOR GENERATING A STANDARD REFERENCE DIE FOR USE IN A DIE TO...
- Publication number 20090041332
- Publication date Feb 12, 2009
- KLA-Tencor Corporation
- Kris Bhaskar
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICE PROPERTY EXTRACTION, GENERATION, VISUALIZATION...
- Publication number 20090037134
- Publication date Feb 5, 2009
- Ashok Kulkarni
- G01 - MEASURING TESTING
Information Patent Application
METHODS FOR IDENTIFYING ARRAY AREAS IN DIES FORMED ON A WAFER AND M...
- Publication number 20080219545
- Publication date Sep 11, 2008
- Chien-Huei Adam Chen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Status Polling
- Publication number 20070124095
- Publication date May 31, 2007
- KLA-Tencor Technologies Corporation
- Krishnamurthy Bhaskar
- G05 - CONTROLLING REGULATING
Information Patent Application
Programmable Image Computer
- Publication number 20070005284
- Publication date Jan 4, 2007
- KLA-Tencor Technologies Corporation
- Krishnamurthy Bhaskar
- G06 - COMPUTING CALCULATING COUNTING

Richard Wallingford

Person

Patents Grantslast 30 patents

Deep learning based defect detection

Automated focusing system for tracking specimen surface with a conf...

System and method for inspection using tensor decomposition and sin...

Determining focus settings for specimen scans

Method and system for mixed mode wafer inspection

Optical-mode selection for multi-mode semiconductor inspection

Active learning for defect classifier training

Systems and methods for detecting defects on a wafer

Systems and methods for defect detection using image reconstruction

Data augmentation for convolutional neural network-based defect ins...

Method and system for mixed mode wafer inspection

Apparatus and methods for finding a best aperture and mode to enhan...

Systems and methods for detecting defects on a wafer

Apparatus and methods for finding a best aperture and mode to enhan...

Detecting defects on a wafer

Status polling

Semiconductor device property extraction, generation, visualization...

Systems and methods for detecting defects on a wafer

Systems and methods for detecting defects on a wafer

Methods for generating a standard reference die for use in a die to...

Computer-implemented methods, carrier media, and systems for select...

Computer-implemented methods, carrier media, and systems for determ...

Methods for identifying array areas in dies formed on a wafer and m...

Memory load balancing

Methods for generating a standard reference die for use in a die to...

Mirror node process verification

Daisy chained topology

Programmable image computer

Full swath analysis

Status polling

Patents Applicationslast 30 patents

DEEP LEARNING MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS

Automated Focusing System For Tracking Specimen Surface with a Conf...

SYSTEM AND METHOD FOR OPTICAL WAFER CHARACTERIZATION WITH IMAGE UP...

DEEP GENERATIVE MODEL-BASED ALIGNMENT FOR SEMICONDUCTOR APPLICATIONS

SEMANTIC IMAGE SEGMENTATION FOR SEMICONDUCTOR-BASED APPLICATIONS

METHOD AND SYSTEM FOR MIXED MODE WAFER INSPECTION

DEEP LEARNING BASED DEFECT DETECTION

DETERMINING FOCUS SETTINGS FOR SPECIMEN SCANS

Automated Focusing System For Tracking Specimen Surface with a Conf...

System and Method for Inspection Using Tensor Decomposition and Sin...

Optical-Mode Selection for Multi-Mode Semiconductor Inspection

ACTIVE LEARNING FOR DEFECT CLASSIFIER TRAINING

Method and System for Mixed Mode Wafer Inspection

SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER

Data Augmentation for Convolutional Neural Network-Based Defect Ins...

APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...

Systems and Methods for Defect Detection Using Image Reconstruction

APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...

Method and System for Mixed Mode Wafer Inspection

Systems and Methods for Detecting Defects on a Wafer

DETECTING DEFECTS ON A WAFER

Systems and Methods for Detecting Defects on a Wafer

METHODS FOR GENERATING A STANDARD REFERENCE DIE FOR USE IN A DIE TO...

SYSTEMS AND METHODS FOR DETECTING DEFECTS ON A WAFER

COMPUTER-IMPLEMENTED METHODS, CARRIER MEDIA, AND SYSTEMS FOR SELECT...

METHODS FOR GENERATING A STANDARD REFERENCE DIE FOR USE IN A DIE TO...

SEMICONDUCTOR DEVICE PROPERTY EXTRACTION, GENERATION, VISUALIZATION...

METHODS FOR IDENTIFYING ARRAY AREAS IN DIES FORMED ON A WAFER AND M...

Status Polling

Programmable Image Computer