Richard Yen-chang Yang

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for improving etch and deposition uniformity i...
- Patent number 6,042,687
- Issue date Mar 28, 2000
- Lam Research Corporation
- Vikram Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-step metallization etch
- Patent number 5,827,437
- Issue date Oct 27, 1998
- Lam Research Corporation
- Richard Yen-chang Yang
- H01 - BASIC ELECTRIC ELEMENTS