Rick Good

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Overlay optimization
- Patent number 11,036,912
- Issue date Jun 15, 2021
- GLOBALFOUNDRIES U.S. INC.
- Richard P. Good
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Initializing individual exposure field parameters of an overlay con...
- Patent number 10,788,806
- Issue date Sep 29, 2020
- GLOBALFOUNDRIES Inc.
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Grant
Across-wafer profile control in semiconductor processes
- Patent number 10,754,319
- Issue date Aug 25, 2020
- GLOBALFOUNDRIES Inc.
- Richard Good
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Selecting manufacturing settings based on historical data from manu...
- Patent number 10,481,592
- Issue date Nov 19, 2019
- GLOBALFOUNDRIES Inc.
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods of error detection in fabrication processes
- Patent number 10,289,109
- Issue date May 14, 2019
- GLOBALFOUNDRIES Inc.
- Richard Good
- G05 - CONTROLLING REGULATING
Information Patent Grant
Methods of error detection in fabrication processes
- Patent number 10,241,502
- Issue date Mar 26, 2019
- GLOBALFOUNDRIES Inc.
- Eugene Barash
- G05 - CONTROLLING REGULATING
Information Patent Grant
Tuning a process controller based on a dynamic sampling rate
- Patent number 8,180,471
- Issue date May 15, 2012
- GLOBALFOUNDRIES Inc.
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method and system for a two-step prediction of a quality distributi...
- Patent number 7,974,801
- Issue date Jul 5, 2011
- Advanced Micro Devices, Inc.
- Richard Good
- G05 - CONTROLLING REGULATING
Information Patent Grant
Identifying manufacturing disturbances using preliminary electrical...
- Patent number 7,908,109
- Issue date Mar 15, 2011
- Advanced Micro Devices, Inc.
- Richard P. Good
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for compensating metrology data for site bias...
- Patent number 7,738,986
- Issue date Jun 15, 2010
- GLOBALFOUNDRIES, INC.
- James Broc Stirton
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for metrology sampling using combination sampl...
- Patent number 7,565,254
- Issue date Jul 21, 2009
- Advanced Micro Devices, Inc.
- Richard P. Good
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Time weighted moving average filter
- Patent number 7,542,880
- Issue date Jun 2, 2009
- Advanced Micro Devices, Inc.
- Richard P. Good
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method and apparatus for selecting sites for sampling
- Patent number 7,330,800
- Issue date Feb 12, 2008
- Advanced Micro Devices, Inc.
- Richard P. Good
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for adaptive sampling based on process covariance
- Patent number 6,985,825
- Issue date Jan 10, 2006
- Advanced Micro Devices, Inc.
- Richard P. Good
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Probability constrained optimization for electrical fabrication con...
- Patent number 6,959,224
- Issue date Oct 25, 2005
- Advanced Micro Devices, Inc.
- Richard P. Good
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Correlating an inline parameter to a device operation parameter
- Patent number 6,810,296
- Issue date Oct 26, 2004
- Advanced Micro Devices, Inc.
- Christopher A. Bode
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR DETECTING A DEFECT IN A SPECIMEN
- Publication number 20240151653
- Publication date May 9, 2024
- GLOBALFOUNDRIES U.S. Inc.
- RICHARD PAUL GOOD
- G01 - MEASURING TESTING
Information Patent Application
OVERLAY OPTIMIZATION
- Publication number 20210141303
- Publication date May 13, 2021
- GLOBALFOUNDRIES U.S. Inc.
- Richard P. GOOD
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INITIALIZING INDIVIDUAL EXPOSURE FIELD PARAMETERS OF AN OVERLAY CON...
- Publication number 20200012252
- Publication date Jan 9, 2020
- GLOBALFOUNDRIES INC.
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Application
SELECTING MANUFACTURING SETTINGS BASED ON HISTORICAL DATA FROM MANU...
- Publication number 20190129390
- Publication date May 2, 2019
- GLOBALFOUNDRIES INC.
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS OF ERROR DETECTION IN FABRICATION PROCESSES
- Publication number 20170097638
- Publication date Apr 6, 2017
- GLOBALFOUNDRIES INC.
- Richard GOOD
- G05 - CONTROLLING REGULATING
Information Patent Application
METHODS OF ERROR DETECTION IN FABRICATION PROCESSES
- Publication number 20170097635
- Publication date Apr 6, 2017
- GLOBALFOUNDRIES INC.
- Eugene BARASH
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TUNING A PROCESS CONTROLLER BASED ON A DYNAMIC SAMPLING RATE
- Publication number 20100305737
- Publication date Dec 2, 2010
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Application
IDENTIFYING MANUFACTURING DISTURBANCES USING PRELIMINARY ELECTRICAL...
- Publication number 20100010768
- Publication date Jan 14, 2010
- Richard P. Good
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR MONITORING A PREDICTED PRODUCT QUALITY DISTRI...
- Publication number 20090276075
- Publication date Nov 5, 2009
- Richard Good
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR A TWO-STEP PREDICTION OF A QUALITY DISTRIBUTI...
- Publication number 20090276174
- Publication date Nov 5, 2009
- Richard Good
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and Apparatus for Compensating Metrology Data for Site Bias...
- Publication number 20080147224
- Publication date Jun 19, 2008
- James Broc Stirton
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and Apparatus for Metrology Sampling Using Combination Sampl...
- Publication number 20080147343
- Publication date Jun 19, 2008
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Application
TIME WEIGHTED MOVING AVERAGE FILTER
- Publication number 20070239285
- Publication date Oct 11, 2007
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Application
Probability constrained optimization for electrical fabrication con...
- Publication number 20040093107
- Publication date May 13, 2004
- Richard P. Good
- G05 - CONTROLLING REGULATING
Information Patent Application
Correlating an inline parameter to a device operation parameter
- Publication number 20040059456
- Publication date Mar 25, 2004
- Christopher A. Bode
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Overlay optimization

Initializing individual exposure field parameters of an overlay con...

Across-wafer profile control in semiconductor processes

Selecting manufacturing settings based on historical data from manu...

Methods of error detection in fabrication processes

Methods of error detection in fabrication processes

Tuning a process controller based on a dynamic sampling rate

Method and system for a two-step prediction of a quality distributi...

Identifying manufacturing disturbances using preliminary electrical...

Method and apparatus for compensating metrology data for site bias...

Method and apparatus for metrology sampling using combination sampl...

Time weighted moving average filter

Method and apparatus for selecting sites for sampling

Method and apparatus for adaptive sampling based on process covariance

Probability constrained optimization for electrical fabrication con...

Correlating an inline parameter to a device operation parameter

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR DETECTING A DEFECT IN A SPECIMEN

OVERLAY OPTIMIZATION

INITIALIZING INDIVIDUAL EXPOSURE FIELD PARAMETERS OF AN OVERLAY CON...

SELECTING MANUFACTURING SETTINGS BASED ON HISTORICAL DATA FROM MANU...

METHODS OF ERROR DETECTION IN FABRICATION PROCESSES

METHODS OF ERROR DETECTION IN FABRICATION PROCESSES

TUNING A PROCESS CONTROLLER BASED ON A DYNAMIC SAMPLING RATE

IDENTIFYING MANUFACTURING DISTURBANCES USING PRELIMINARY ELECTRICAL...

METHOD AND SYSTEM FOR MONITORING A PREDICTED PRODUCT QUALITY DISTRI...

METHOD AND SYSTEM FOR A TWO-STEP PREDICTION OF A QUALITY DISTRIBUTI...

Method and Apparatus for Compensating Metrology Data for Site Bias...

Method and Apparatus for Metrology Sampling Using Combination Sampl...

TIME WEIGHTED MOVING AVERAGE FILTER

Probability constrained optimization for electrical fabrication con...

Correlating an inline parameter to a device operation parameter