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Rick J. Orth
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Kennewick, WA, US
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last 30 patents
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Patent Grant
Processes for treating halogen-containing gases
Patent number
7,220,396
Issue date
May 22, 2007
Battelle Memorial Institute
Christopher L. Aardahl
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Grant
Treatment of effluent from a substrate processing chamber
Patent number
7,160,521
Issue date
Jan 9, 2007
Applied Materials, Inc.
Peter Porshnev
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
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Patent Application
Treatment of effluent from a substrate processing chamber
Publication number
20040001787
Publication date
Jan 1, 2004
APPLIED MATERIALS, INC.
Peter Porshnev
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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Patent Application
Processes and apparatuses for treating halogen-containing gases
Publication number
20030161774
Publication date
Aug 28, 2003
Battelle Memorial Institute
Gary B. Josephson
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL