Rick M. Heathwaite

Follow

Person

Manchester, NH, US

People

Patents Grantslast 30 patents

Information Patent Grant
Supercritical fluid delivery and recovery system for semiconductor...
- Patent number 6,612,317
- Issue date Sep 2, 2003
- S.C. Fluids, Inc.
- Michael A. Costantini
- B08 - CLEANING
Information Patent Grant
Supercritical fluid cleaning process for precision surfaces
- Patent number 6,602,349
- Issue date Aug 5, 2003
- S.C. Fluids, Inc.
- Mohan Chandra
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
Supercritical fluid cleaning process for precision surfaces
- Publication number 20020014257
- Publication date Feb 7, 2002
- Mohan Chandra
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Supercritical fluid delivery and recovery system for semiconductor...
- Publication number 20010050096
- Publication date Dec 13, 2001
- Michael A. Costantini
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL