Rick Sandstrom

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light source
- Patent number 10,667,377
- Issue date May 26, 2020
- ASML Netherlands B.V.
- Robert Jay Rafac
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV light source with subsystem(s) for maintaining LPP drive laser...
- Patent number 9,390,827
- Issue date Jul 12, 2016
- ASML Netherlands B.V.
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Adaptive laser system for an extreme ultraviolet light source
- Patent number 9,380,691
- Issue date Jun 28, 2016
- ASML Netherlands B.V.
- Yezheng Tao
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Regenerative ring resonator
- Patent number RE45957
- Issue date Mar 29, 2016
- Cymer, LLC
- Hong Ye
- 001 -
Information Patent Grant
Extreme ultraviolet light source
- Patent number 9,232,623
- Issue date Jan 5, 2016
- ASML Netherlands B.V.
- Robert J. Rafac
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High power seed/amplifier laser system with beam shaping intermedia...
- Patent number 9,018,561
- Issue date Apr 28, 2015
- Cymer, LLC
- Richard L Sandstrom
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Master oscillator—power amplifier drive laser with pre-pulse for EU...
- Patent number 8,958,143
- Issue date Feb 17, 2015
- ASML Netherlands B.V.
- Kai-Chung Hou
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for protecting a seed laser in an EUV light sourc...
- Patent number 8,848,277
- Issue date Sep 30, 2014
- ASML Netherlands B.V.
- Richard L. Sandstrom
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for seed laser mode stabilization
- Patent number 8,811,440
- Issue date Aug 19, 2014
- ASML Netherlands B.V.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-pass optical apparatus
- Patent number 8,810,902
- Issue date Aug 19, 2014
- ASML Netherlands B.V.
- Richard L. Sandstrom
- G02 - OPTICS
Information Patent Grant
Systems and methods for implementing an interaction between a laser...
- Patent number 8,737,438
- Issue date May 27, 2014
- Cymer, LLC
- Palash P. Das
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Illumination apparatus and method for controlling energy of a laser...
- Patent number 8,723,073
- Issue date May 13, 2014
- Cymer, LLC
- Bernhard Weigl
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
EUV light source with subsystem(s) for maintaining LPP drive laser...
- Patent number 8,653,437
- Issue date Feb 18, 2014
- Cymer, LLC
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Master oscillator-power amplifier drive laser with pre-pulse for EU...
- Patent number 8,654,438
- Issue date Feb 18, 2014
- Cymer, LLC
- Kai-Chung Hou
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extendable electrode for gas discharge laser
- Patent number 8,526,481
- Issue date Sep 3, 2013
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oscillator-amplifier drive laser with seed protection for an EUV li...
- Patent number 8,462,425
- Issue date Jun 11, 2013
- Cymer, Inc.
- Kai-Chung Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extendable electrode for gas discharge laser
- Patent number 8,446,928
- Issue date May 21, 2013
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge laser line narrowing module
- Patent number 8,379,687
- Issue date Feb 19, 2013
- Cymer, Inc.
- Raymond F. Cybulski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for managing light source operation
- Patent number 8,295,316
- Issue date Oct 23, 2012
- Cymer, Inc.
- Robert P. Akins
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for implementing an interaction between a laser...
- Patent number 8,265,109
- Issue date Sep 11, 2012
- Cymer, Inc.
- Palash P. Das
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser system
- Patent number 8,170,078
- Issue date May 1, 2012
- Cymer, Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser produced plasma EUV light source
- Patent number 8,158,960
- Issue date Apr 17, 2012
- Cymer, Inc.
- Georgiy O. Vaschenko
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Laser system
- Patent number 8,144,740
- Issue date Mar 27, 2012
- Cymer, Inc.
- Daniel J. W. Brown
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System, method and apparatus for droplet catcher for prevention of...
- Patent number 8,138,487
- Issue date Mar 20, 2012
- Cymer, Inc.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Line narrowing module
- Patent number 8,126,027
- Issue date Feb 28, 2012
- Cymer, Inc.
- J. Martin Algots
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV collector debris management
- Patent number 8,075,732
- Issue date Dec 13, 2011
- Cymer, Inc.
- William N. Partlo
- B08 - CLEANING
Information Patent Grant
Regenerative ring resonator
- Patent number 8,014,432
- Issue date Sep 6, 2011
- Cymer, Inc.
- Hong Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas discharge laser chamber
- Patent number 7,995,637
- Issue date Aug 9, 2011
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control system for a two chamber gas discharge laser system
- Patent number RE42588
- Issue date Aug 2, 2011
- Cymer, Inc.
- John P. Fallon
- 372 - Coherent light generators
Information Patent Grant
Laser system
- Patent number 7,920,616
- Issue date Apr 5, 2011
- Cymer, Inc.
- Daniel J. W. Brown
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER...
- Publication number 20180184509
- Publication date Jun 28, 2018
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER...
- Publication number 20180020532
- Publication date Jan 18, 2018
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20160192468
- Publication date Jun 30, 2016
- ASML NETHERLANDS B.V.
- Robert Jay Rafac
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
ADAPTIVE LASER SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20150250045
- Publication date Sep 3, 2015
- ASML NETHERLANDS B.V.
- Yezheng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE
- Publication number 20150208494
- Publication date Jul 23, 2015
- ASML NETHERLANDS B.V.
- Robert J. Rafac
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EUV Light Source With Subsystem(s) For Maintaining LPP Drive Laser...
- Publication number 20140145096
- Publication date May 29, 2014
- CYMER, LLC
- William N. Partlo
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Master Oscillator-Power Amplifier Drive Laser With Pre-Pulse for EU...
- Publication number 20140146387
- Publication date May 29, 2014
- CYMER, LLC
- Kai-Chung Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Seed Laser Mode Stabilization
- Publication number 20140072006
- Publication date Mar 13, 2014
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Protecting a Seed Laser in an EUV Light Sourc...
- Publication number 20130322482
- Publication date Dec 5, 2013
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER...
- Publication number 20120298838
- Publication date Nov 29, 2012
- Cymer, Inc.
- Palash P. Das
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
- Publication number 20120219032
- Publication date Aug 30, 2012
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-Pass Optical Apparatus
- Publication number 20120170112
- Publication date Jul 5, 2012
- Cymer, Inc.
- Richard L. Sandstrom
- G02 - OPTICS
Information Patent Application
OSCILLATOR-AMPLIFIER DRIVE LASER WITH SEED PROTECTION FOR AN EUV LI...
- Publication number 20120092746
- Publication date Apr 19, 2012
- Cymer, Inc.
- Kai-Chung Hou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM
- Publication number 20120087386
- Publication date Apr 12, 2012
- Cymer, Inc.
- Daniel J.W. Brown
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER...
- Publication number 20120080584
- Publication date Apr 5, 2012
- William N. Partlo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method and System for Managing Light Source Operation
- Publication number 20110235663
- Publication date Sep 29, 2011
- Robert P. Akins
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Line Narrowing Module
- Publication number 20110194580
- Publication date Aug 11, 2011
- Cymer, Inc.
- J. Martin Algots
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH POWER HIGH PULSE REPETITION RATE GAS DISCHARGE LASER SYSTEM
- Publication number 20110122901
- Publication date May 26, 2011
- Cymer, Inc.
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser System
- Publication number 20110102759
- Publication date May 5, 2011
- Cymer, Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REGENERATIVE RING RESONATOR
- Publication number 20110069733
- Publication date Mar 24, 2011
- CYMER INC.
- Hong Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER
- Publication number 20110058580
- Publication date Mar 10, 2011
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser Produced Plasma EUV Light Source
- Publication number 20100294953
- Publication date Nov 25, 2010
- Cymer, Inc.
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF...
- Publication number 20100258748
- Publication date Oct 14, 2010
- Georgiy O. Vaschenko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS DISCHARGE LASER CHAMBER
- Publication number 20100142582
- Publication date Jun 10, 2010
- Richard L. Sandstrom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser system
- Publication number 20100108913
- Publication date May 6, 2010
- Cymer, Inc.
- Alexander I. Ershov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Line narrowing module
- Publication number 20100097704
- Publication date Apr 22, 2010
- Cymer, Inc.
- J. Martin Algots
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Immersion lithography laser light source with pulse stretcher
- Publication number 20100074295
- Publication date Mar 25, 2010
- Cymer, Inc.
- William N. Partlo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Laser system
- Publication number 20090296755
- Publication date Dec 3, 2009
- Cymer, Inc.
- Daniel J.W. Brown
- G02 - OPTICS
Information Patent Application
Laser system
- Publication number 20090296758
- Publication date Dec 3, 2009
- Cymer, Inc.
- Daniel J.W. Brown
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Systems and methods for implementing an interaction between a laser...
- Publication number 20090256057
- Publication date Oct 15, 2009
- Cymer, Inc.
- Palash P. Das
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Rick Sandstrom

Person

Patents Grantslast 30 patents

Extreme ultraviolet light source

EUV light source with subsystem(s) for maintaining LPP drive laser...

Adaptive laser system for an extreme ultraviolet light source

Regenerative ring resonator

Extreme ultraviolet light source

High power seed/amplifier laser system with beam shaping intermedia...

Master oscillator—power amplifier drive laser with pre-pulse for EU...

System and method for protecting a seed laser in an EUV light sourc...

System and method for seed laser mode stabilization

Multi-pass optical apparatus

Systems and methods for implementing an interaction between a laser...

Illumination apparatus and method for controlling energy of a laser...

EUV light source with subsystem(s) for maintaining LPP drive laser...

Master oscillator-power amplifier drive laser with pre-pulse for EU...

Extendable electrode for gas discharge laser

Oscillator-amplifier drive laser with seed protection for an EUV li...

Extendable electrode for gas discharge laser

Gas discharge laser line narrowing module

Method and system for managing light source operation

Systems and methods for implementing an interaction between a laser...

Laser system

Laser produced plasma EUV light source

Laser system

System, method and apparatus for droplet catcher for prevention of...

Line narrowing module

EUV collector debris management

Regenerative ring resonator

Gas discharge laser chamber

Control system for a two chamber gas discharge laser system

Laser system

Patents Applicationslast 30 patents

EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER...

EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER...

EXTREME ULTRAVIOLET LIGHT SOURCE

ADAPTIVE LASER SYSTEM FOR AN EXTREME ULTRAVIOLET LIGHT SOURCE

EXTREME ULTRAVIOLET LIGHT SOURCE

EUV Light Source With Subsystem(s) For Maintaining LPP Drive Laser...

Master Oscillator-Power Amplifier Drive Laser With Pre-Pulse for EU...

System and Method for Seed Laser Mode Stabilization

System and Method for Protecting a Seed Laser in an EUV Light Sourc...

SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER...

EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER

Multi-Pass Optical Apparatus

OSCILLATOR-AMPLIFIER DRIVE LASER WITH SEED PROTECTION FOR AN EUV LI...

LASER SYSTEM

EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER...

Method and System for Managing Light Source Operation

Line Narrowing Module

HIGH POWER HIGH PULSE REPETITION RATE GAS DISCHARGE LASER SYSTEM

Laser System

REGENERATIVE RING RESONATOR

EXTENDABLE ELECTRODE FOR GAS DISCHARGE LASER

Laser Produced Plasma EUV Light Source

SYSTEM, METHOD AND APPARATUS FOR DROPLET CATCHER FOR PREVENTION OF...

GAS DISCHARGE LASER CHAMBER

Laser system

Line narrowing module

Immersion lithography laser light source with pulse stretcher

Laser system

Laser system

Systems and methods for implementing an interaction between a laser...