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Rick White
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Nashua, NH, US
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Patents Grants
last 30 patents
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Patent Grant
Method and apparatus for rotation of a workpiece in supercritical f...
Patent number
7,108,001
Issue date
Sep 19, 2006
Keith Pope
B08 - CLEANING
Information
Patent Grant
Method and apparatus for synthesis and growth of semiconductor crys...
Patent number
6,019,841
Issue date
Feb 1, 2000
G.T. Equuipment Technologies Inc.
Ijaz H. Jafri
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
SUPERCRITICAL FLUID DELIVERY SYSTEM FOR SEMICONDUCTOR WAFER PROCESSING
Publication number
20070012341
Publication date
Jan 18, 2007
Stephen B. Douglas
B08 - CLEANING
Information
Patent Application
Loadbearing platform with fluid support, isolation and rotation
Publication number
20060029310
Publication date
Feb 9, 2006
S.C. FLUIDS, INC.
Rick C. White
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Application
Method and apparatus for rotation of a workpiece in supercritical f...
Publication number
20040194817
Publication date
Oct 7, 2004
Keith Pope
B08 - CLEANING
Information
Patent Application
Supercritical fluid delivery system for semiconductor wafer processing
Publication number
20040025908
Publication date
Feb 12, 2004
Stephen Douglas
B08 - CLEANING
Information
Patent Application
Supercritical fluid processes with megasonics
Publication number
20030116176
Publication date
Jun 26, 2003
Laura B. Rothman
B08 - CLEANING