Rigo Richter

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Zeulenroda-Triebes, DE

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Patents Grantslast 30 patents

Information Patent Grant
Method for emulation of a photolithographic process and mask inspec...
- Patent number 8,913,120
- Issue date Dec 16, 2014
- Carl Zeiss SMS GmbH
- Eric Poortinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measuring of masks for the photo-lithography
- Patent number 8,730,474
- Issue date May 20, 2014
- Carl Zeiss SMS GmbH
- Thomas Scheruebl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for analyzing a group of photolithographic masks
- Patent number 8,264,535
- Issue date Sep 11, 2012
- Carl Zeiss SMS GmbH
- Oliver Kienzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR EMULATION OF A PHOTOLITHOGRAPHIC PROCESS AND MASK INSPEC...
- Publication number 20110090329
- Publication date Apr 21, 2011
- Carl Zeiss SMS GmbH
- Eric Poortinga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR MEASURING OF MASKS FOR THE PHOTO-LITHOGRAPHY
- Publication number 20110016437
- Publication date Jan 20, 2011
- Thomas Scherübl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND APPARATUS FOR ANALYZING A GROUP OF PHOTOLITHOGRAPHIC MASKS
- Publication number 20100157046
- Publication date Jun 24, 2010
- Oliver Kienzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY