Rikhit Arora

Person

Mesa, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for low temperature deposition of CVD and PECV...
- Patent number 6,140,215
- Issue date Oct 31, 2000
- Tokyo Electron Limited
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for low temperature deposition of CVD and PECV...
- Patent number 5,628,829
- Issue date May 13, 1997
- Materials Research Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma enhanced chemical vapor deposition of titanium nitride using...
- Patent number 5,610,106
- Issue date Mar 11, 1997
- Sony Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for plasma enhanced anneal of titanium nitride
- Patent number 5,567,483
- Issue date Oct 22, 1996
- Sony Corporation
- Robert F. Foster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotating susceptor semiconductor wafer processing cluster tool modu...
- Patent number 5,370,739
- Issue date Dec 6, 1994
- Materials Research Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer processing method and apparatus with heat and g...
- Patent number 5,356,476
- Issue date Oct 18, 1994
- Materials Research Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor wafer processing CVD reactor apparatus comprising con...
- Patent number 5,273,588
- Issue date Dec 28, 1993
- Materials Research Corporation
- Robert F. Foster
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Rikhit Arora

Person

Patents Grantslast 30 patents

Method and apparatus for low temperature deposition of CVD and PECV...

Method and apparatus for low temperature deposition of CVD and PECV...

Plasma enhanced chemical vapor deposition of titanium nitride using...

Process for plasma enhanced anneal of titanium nitride

Rotating susceptor semiconductor wafer processing cluster tool modu...

Semiconductor wafer processing method and apparatus with heat and g...

Semiconductor wafer processing CVD reactor apparatus comprising con...