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Riki OGAWA
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Kawasaki-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Inspection apparatus and inspection method
Patent number
11,385,192
Issue date
Jul 12, 2022
NuFlare Technology, Inc.
Masataka Shiratsuchi
G01 - MEASURING TESTING
Information
Patent Grant
Multibeam inspection apparatus
Patent number
11,189,459
Issue date
Nov 30, 2021
NuFlare Technology, Inc.
Hideaki Hashimoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electron beam inspection apparatus and multiple electron b...
Patent number
11,101,103
Issue date
Aug 24, 2021
NuFlare Technology, Inc.
Masataka Shiratsuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection method and inspection apparatus
Patent number
11,004,193
Issue date
May 11, 2021
NuFlare Technology, Inc.
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Grant
Multiple electron beam irradiation apparatus, multiple electron bea...
Patent number
11,004,657
Issue date
May 11, 2021
NuFlare Technology, Inc.
Shinji Sugihara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electron beam inspection apparatus and multiple electron b...
Patent number
10,984,978
Issue date
Apr 20, 2021
NuFlare Technology, Inc.
Hiromu Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspection method and pattern inspection apparatus
Patent number
10,984,525
Issue date
Apr 20, 2021
NuFlare Technology, Inc.
Ryoichi Hirano
G01 - MEASURING TESTING
Information
Patent Grant
Pattern inspection apparatus and pattern inspection method
Patent number
10,846,846
Issue date
Nov 24, 2020
NuFlare Technology, Inc.
Masataka Shiratsuchi
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam inspection apparatus and electron beam inspection method
Patent number
10,775,326
Issue date
Sep 15, 2020
NuFlare Technology, Inc.
Hideo Tsuchiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple charged particle beam inspection apparatus and multiple ch...
Patent number
10,768,126
Issue date
Sep 8, 2020
NuFlare Technology, Inc.
Riki Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple electron beam irradiation apparatus, multiple electron bea...
Patent number
10,734,190
Issue date
Aug 4, 2020
NuFlare Technology, Inc.
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam inspection method
Patent number
10,727,026
Issue date
Jul 28, 2020
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern inspection apparatus and pattern inspection method
Patent number
10,719,928
Issue date
Jul 21, 2020
NuFlare Technology, Inc.
Toshiaki Otaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Electron beam inspection apparatus and electron beam inspection method
Patent number
10,712,295
Issue date
Jul 14, 2020
NUFLARE TECHNOLOGY, INC.
Hideo Tsuchiya
G01 - MEASURING TESTING
Information
Patent Grant
Displacement measuring apparatus, electron beam inspection apparatu...
Patent number
10,655,956
Issue date
May 19, 2020
NuFlare Technology, Inc.
Riki Ogawa
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and inspection apparatus
Patent number
10,643,327
Issue date
May 5, 2020
NuFlare Technology, Inc.
Riki Ogawa
G02 - OPTICS
Information
Patent Grant
Polarized image acquisition apparatus, pattern inspection apparatus...
Patent number
10,636,138
Issue date
Apr 28, 2020
NuFlare Technology, Inc.
Riki Ogawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Mask inspection apparatus and mask inspection method
Patent number
10,488,180
Issue date
Nov 26, 2019
NuFlare Technology, Inc.
Yasuhiro Yamashita
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Polarized image acquisition apparatus, pattern inspection apparatus...
Patent number
10,444,487
Issue date
Oct 15, 2019
NuFlare Technology, Inc.
Riki Ogawa
G02 - OPTICS
Information
Patent Grant
Inspection method and inspection apparatus
Patent number
10,410,335
Issue date
Sep 10, 2019
NuFlare Technology, Inc.
Riki Ogawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Image capturing apparatus and inspection apparatus and inspection m...
Patent number
10,401,299
Issue date
Sep 3, 2019
NuFlare Technology, Inc.
Riki Ogawa
G02 - OPTICS
Information
Patent Grant
Pattern inspection apparatus for detecting a pattern defect
Patent number
10,386,308
Issue date
Aug 20, 2019
NuFlare Technology, Inc.
Toshiaki Otaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Template substrate for use in adjusting focus offset for defect det...
Patent number
10,359,370
Issue date
Jul 23, 2019
NuFlare Technology, Inc.
Hideo Tsuchiya
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern inspection apparatus
Patent number
10,282,635
Issue date
May 7, 2019
NuFlare Technology, Inc.
Riki Ogawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Focusing apparatus, focusing method, and pattern inspection method
Patent number
10,222,341
Issue date
Mar 5, 2019
NuFlare Technology, Inc.
Toshiaki Otaki
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Inspection apparatus
Patent number
10,197,507
Issue date
Feb 5, 2019
NuFlare Technology, Inc.
Riki Ogawa
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for measuring pattern width deviation, and pattern inspectio...
Patent number
10,192,304
Issue date
Jan 29, 2019
NuFlare Technology, Inc.
Kazuhiko Inoue
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Charged particle beam inspection apparatus and charged particle bea...
Patent number
10,041,892
Issue date
Aug 7, 2018
NuFlare Technology, Inc.
Masataka Shiratsuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Image capturing device and inspection apparatus and inspection method
Patent number
10,036,714
Issue date
Jul 31, 2018
NuFlare Technology, Inc.
Riki Ogawa
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and inspection apparatus
Patent number
10,007,980
Issue date
Jun 26, 2018
NuFlare Technology, Inc.
Riki Ogawa
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20240175829
Publication date
May 30, 2024
NuFlare Technology, Inc.
Masataka SHIRATSUCHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
INSPECTION APPARATUS
Publication number
20220299456
Publication date
Sep 22, 2022
NuFlare Technology, Inc.
Riki OGAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20210010959
Publication date
Jan 14, 2021
NuFlare Technology, Inc.
Masataka SHIRATSUCHI
G01 - MEASURING TESTING
Information
Patent Application
MULTIBEAM INSPECTION APPARATUS
Publication number
20200395191
Publication date
Dec 17, 2020
NuFlare Technology, Inc.
Hideaki HASHIMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE ELECTRON BEAM INSPECTION APPARATUS AND MULTIPLE ELECTRON B...
Publication number
20200286709
Publication date
Sep 10, 2020
NuFlare Technology, Inc.
Masataka SHIRATSUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS, MULTIPLE ELECTRON BEA...
Publication number
20200234919
Publication date
Jul 23, 2020
NuFlare Technology, Inc.
Shinji SUGIHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MULTIPLE ELECTRON BEAM INSPECTION APPARATUS AND MULTIPLE ELECTRON B...
Publication number
20200161082
Publication date
May 21, 2020
NuFlare Technology, Inc.
Hiromu INOUE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Electron Beam Inspection Apparatus and Electron Beam Inspection Method
Publication number
20190369035
Publication date
Dec 5, 2019
NUFLARE TECHNOLOGY, INC.
Hideo Tsuchiya
G01 - MEASURING TESTING
Information
Patent Application
MULTIPLE CHARGED PARTICLE BEAM INSPECTION APPARATUS AND MULTIPLE CH...
Publication number
20190360951
Publication date
Nov 28, 2019
NuFlare Technology, Inc.
Riki OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DISPLACEMENT MEASUREMENT DEVICE AND DISPLACEMENT MEASUREMENT METHOD
Publication number
20190361124
Publication date
Nov 28, 2019
NuFlare Technology, Inc.
Riki OGAWA
G01 - MEASURING TESTING
Information
Patent Application
MULTIPLE ELECTRON BEAM IRRADIATION APPARATUS, MULTIPLE ELECTRON BEA...
Publication number
20190355547
Publication date
Nov 21, 2019
NuFlare Technology, Inc.
Atsushi Ando
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20190346769
Publication date
Nov 14, 2019
NuFlare Technology, Inc.
Hideaki Hashimoto
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ELECTRON BEAM INSPECTION APPARATUS AND ELECTRON BEAM INSPECTION METHOD
Publication number
20190277782
Publication date
Sep 12, 2019
NuFlare Technology, Inc.
Hideo Tsuchiya
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION METHOD AND PATTERN INSPECTION APPARATUS
Publication number
20190279348
Publication date
Sep 12, 2019
NuFlare Technology, Inc.
Ryoichi Hirano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CHARGED PARTICLE BEAM INSPECTION METHOD
Publication number
20190259572
Publication date
Aug 22, 2019
NuFlare Technology, Inc.
Chosaku NODA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
Publication number
20190213726
Publication date
Jul 11, 2019
NuFlare Technology, Inc.
Ryoichi Hirano
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DISPLACEMENT MEASURING APPARATUS, ELECTRON BEAM INSPECTION APPARATU...
Publication number
20190195621
Publication date
Jun 27, 2019
NuFlare Technology, Inc.
Riki OGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
Publication number
20190066286
Publication date
Feb 28, 2019
NuFlare Technology, Inc.
Masataka SHIRATSUCHI
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
POLARIZED IMAGE ACQUISITION APPARATUS, PATTERN INSPECTION APPARATUS...
Publication number
20180364472
Publication date
Dec 20, 2018
NuFlare Technology, Inc.
Riki Ogawa
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
IMAGE CAPTURING DEVICE AND INSPECTION APPARATUS AND INSPECTION METHOD
Publication number
20180335394
Publication date
Nov 22, 2018
NuFlare Technology, Inc.
Riki OGAWA
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
Publication number
20180293724
Publication date
Oct 11, 2018
NuFlare Technology, Inc.
Riki OGAWA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
POLARIZED IMAGE ACQUISITION APPARATUS, PATTERN INSPECTION APPARATUS...
Publication number
20180114306
Publication date
Apr 26, 2018
NuFlare Technology, Inc.
Riki OGAWA
G02 - OPTICS
Information
Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
Publication number
20180075595
Publication date
Mar 15, 2018
NuFlare Technology, Inc.
Riki OGAWA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TEMPLATE SUBSTRATE FOR USE IN ADJUSTING FOCUS OFFSET FOR DEFECT DET...
Publication number
20180045656
Publication date
Feb 15, 2018
NuFlare Technology, Inc.
Hideo TSUCHIYA
G01 - MEASURING TESTING
Information
Patent Application
CHARGED PARTICLE BEAM INSPECTION APPARATUS AND CHARGED PARTICLE BEA...
Publication number
20180031498
Publication date
Feb 1, 2018
NuFlare Technology, Inc.
Masataka SHIRATSUCHI
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION APPARATUS
Publication number
20180024075
Publication date
Jan 25, 2018
NuFlare Technology, Inc.
Toshiaki OTAKI
G01 - MEASURING TESTING
Information
Patent Application
FOCUSING APPARATUS, FOCUSING METHOD, AND PATTERN INSPECTION METHOD
Publication number
20180003649
Publication date
Jan 4, 2018
NuFlare Technology, Inc.
Toshiaki OTAKI
G01 - MEASURING TESTING
Information
Patent Application
PATTERN INSPECTION APPARATUS
Publication number
20170206433
Publication date
Jul 20, 2017
NuFlare Technology, Inc.
Riki OGAWA
G01 - MEASURING TESTING
Information
Patent Application
INSPECTION METHOD AND INSPECTION APPARATUS
Publication number
20170132772
Publication date
May 11, 2017
NuFlare Technology, Inc.
Riki OGAWA
G02 - OPTICS
Information
Patent Application
METHOD FOR MEASURING PATTERN WIDTH DEVIATION, AND PATTERN INSPECTIO...
Publication number
20170069111
Publication date
Mar 9, 2017
NuFlare Technology, Inc.
Kazuhiko INOUE
G06 - COMPUTING CALCULATING COUNTING