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Rikita Tsunoda
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Kawasaki, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of recovering resist pattern
Patent number
10,429,740
Issue date
Oct 1, 2019
Tokyo Ohka Kogyo Co., Ltd.
Junichi Tsuchiya
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of forming resist pattern
Patent number
9,696,625
Issue date
Jul 4, 2017
Tokyo Ohka Kogyo Co., Ltd.
Tomoyuki Hirano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for forming resist pattern, resist pattern splitting agent,...
Patent number
9,618,845
Issue date
Apr 11, 2017
Tokyo Ohka Kogyo Co., Ltd.
Yoichi Hori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of trimming resist pattern
Patent number
9,581,909
Issue date
Feb 28, 2017
Tokyo Ohka Kogyo Co., Ltd.
Rikita Tsunoda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Negative tone resist composition for solvent developing and method...
Patent number
9,459,528
Issue date
Oct 4, 2016
Tokyo Ohka Kogyo Co., Ltd.
Tomohiro Oikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
METHOD OF RECOVERING RESIST PATTERN
Publication number
20160274464
Publication date
Sep 22, 2016
Tokyo Ohka Kogyo Co., Ltd.
Junichi TSUCHIYA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF FORMING RESIST PATTERN
Publication number
20160266495
Publication date
Sep 15, 2016
Tokyo Ohka Kogyo Co., Ltd.
Tomoyuki HIRANO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF TRIMMING RESIST PATTERN
Publication number
20160097979
Publication date
Apr 7, 2016
Tokyo Ohka Kogyo Co., Ltd.
Rikita TSUNODA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR FORMING RESIST PATTERN, RESIST PATTERN SPLITTING AGENT,...
Publication number
20160091790
Publication date
Mar 31, 2016
Tokyo Ohka Kogyo Co., Ltd.
Yoichi Hori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
NEGATIVE TONE RESIST COMPOSITION FOR SOLVENT DEVELOPING AND METHOD...
Publication number
20140363770
Publication date
Dec 11, 2014
Tomohiro Oikawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY